Hysteresis effect during reactive sputtering von Shapovalov, V I

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Deposition of solid solution films using reactive magnetron sputtering of a sandwich target von Shapovalov, V I

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Nanopowders and films of titanium oxide for photocatalysis: A review von Shapovalov, V. I.

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Hot Target. Physicochemical Model of Reactive Sputtering von Shapovalov, V. I.

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High-power sputtering employed for film deposition von Shapovalov, V I

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Discharge modeling of a DC magnetron von Shabalin, A E, Shapovalov, V I

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Study of the parameters of molybdenum oxide films by optical methods von Nikolyukin, D S, Shapovalov, V I

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I-V characteristics of magnetron with hot target sputtered in three-component gas mixture von Shapovalov, V I, Shabalin, A E

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Chemical composition and crystal structure of tungsten oxide films von Shapovalov, V. I., Lapshin, A. E., Gagarin, A. G., Efimenko, L. P.

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On the Deposition of an FexNi1 – x Film by the Magnetron Sputtering of a Multilayer Target von Shapovalov, V. I., Ivantsov, M. O., Krainov, N. S.

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Discharge parameters of a magnetron with a molybdenum target von Kraynov, N S, Sharipov, A A, Shapovalov, V I

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A nonisothermal physicochemical model of synthesis of oxynitrides by reactive sputtering techniques von Barybin, A. A., Zav’yalov, A. V., Shapovalov, V. I.

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I-V characteristics of magnetron with hot titanium target sputtered in argon-oxygen mixture von Minzhulina, E A, Shapovalov, V I, Aslan, N, Shestakov, D S

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Reactive magnetron sputtering of hot titanium target in mixture of argon and nitrogen von Shapovalov, V I, Minzhulina, E A, Shestakov, D S, Kochin, A V

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Characteristics of magnetron sputtering of hot titanium target in argon von Minzhulina, E A, Shapovalov, V I, Shestakov, D S, Rudakov, A V

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Modelling of hot target reactive sputtering von Shapovalov, V I, Smirnov, V V

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Magnetron discharge with molybdenum target in argon von Shestakov, D S, Shapovalov, V I, Rudakov, A V, Shabalin, A E, Pavlov, V A

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Determination of optical constants of thin dielectric films using the spectral transmission coefficient von Shapovalov, V. I., Morozova, A. A., Lapshin, A. E.

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Time saving technique for studying thermal processes in magnetron sputtering of titanium target von Pavlov, V A, Shapovalov, V I, Shestakov, D S, Rudakov, A V, Shabalin, A E

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Study of the effect of argon pressure on the temperature of a hot target von Kozin, A A, Shapovalov, V I, Ahmedov, H, Demir, A, Korutlu, B, Shabalin, A E

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