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    Electrical characterization of thin silicon films produced by metal-induced crystallization on insulating substrates by conductive AFM

    Electrical characterization of thin silicon films produced by metal-induced crystallization on insulating substrates by conductive AFM von Shamiryan, Oxana, Maidanchuk, Ivan, Ahn, Nari, Choi, Ilsang, Kyoon, Chung Ho

    Veröffentlicht in Journal of Surface Analysis

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