Study of silicon surface micro‐roughness generated by SF6 remote plasma etching von Saloum, Saker, Zrir, Mohammad Ali, Alkhaled, Bashar, Shaker, Samer Abou, Balloul, Yamen, Ghannoum, Daliah, Alkafri, Mohammad Nidal

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Polymer surface modification using He/O2 RF remote low‐pressure plasma von Saloum, Saker, Abou Shaker, Samer, Alwazzeh, Moneer, Hussin, Rokayya

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Effect of surface modification on the properties of plasma‐polymerized hexamethyldisiloxane thin films von Saloum, Saker, Abou Shaker, Samer, Alkafri, M.Nidal, Obaid, Asmhan, Hussin, Rokayya

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Polymer surface modification using He/O 2 RF remote low‐pressure plasma von Saloum, Saker, Abou Shaker, Samer, Alwazzeh, Moneer, Hussin, Rokayya

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Study of silicon surface micro‐roughness generated by SF 6 remote plasma etching von Saloum, Saker, Zrir, Mohammad Ali, Alkhaled, Bashar, Shaker, Samer Abou, Balloul, Yamen, Ghannoum, Daliah, Alkafri, Mohammad Nidal

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