High-brightness LPP EUV light source von Ivanov Vladimir Vitalievich, Kryvokorytov Mikhail Sergeyevich, Yakushev Oleg Feliksovich, Koshelev Konstantin Nikolaevich, Vinokhodov Aleksandr Yurievich, Medvedev Vyacheslav Valerievich, Seroglazov Pavel Viktorovich, Antsiferov Pavel Stanislavovich, Glushkov Denis Alexandrovich, Ellwi Samir, Krivtsun Vladimir Mikhailovich, Lash Aleksandr Andreevich, Sidelnikov Yury Viktorovich

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HIGH-FREQUENCY SOURCE OF EUF-RADIATION AND METHOD OF GENERATION OF RADIATION FROM LASER PLASMA von Yakushev Oleg Feliksovich, Koshelev Konstantin Nikolaevich, Seroglazov Pavel, Krivtsun Vladimir Mikhajlovich, Seroglazov Pavel Viktorovich, Sidelnikov Yurij Viktorovich, Glushkov Denis, Krivokorytov Mikhail Sergeevich, Medvedev Vyacheslav Valerevich, Ivanov Vladimir Vitalevich, Ellwi Samir, Elvi Samir, Lash Aleksandr Andreevich

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