Measurements of electron energy distribution functions and electron transport in the downstream region of an unbalanced dc magnetron discharge von Seo, Sang-Hun, In, Jung-Hwan, Chang, Hong-Young

Volltext

The trend of electron temperature and electron density in the process of microcrystalline silicon solar cells von Lee, Yun-Seong, In, Jung-Hwan, Ahn, Seung-Kyu, Seo, Sang-Hun, Chang, Hong-Young, You, Dong-Joo, Ahn, Seh-Won, Lee, Heon-Min

Volltext

Electron energy distribution function and plasma potential in a planar inductive argon discharge without electrostatic screen von Seo, Sang-Hun, Hong, Jung-In, Chang, Hong-Young

Volltext

Time evolution of electronegativity in a pulsed inductively coupled oxygen plasma von Lee, Jeong-Beom, Seo, Sang-Hun, Chang, Hong-Young

Volltext

On the heating mode transition in high-frequency inductively coupled argon discharge von Seo, Sang-Hun, Hong, Jung-In, Bai, Keun-Hee, Chang, Hong-Young

Volltext

A novel pulsing method for the enhancement of the deposition rate in high power pulsed magnetron sputtering von In, Jung-Hwan, Seo, Sang-Hun, Chang, Hong-Young

Volltext

Effect of duty cycle on plasma parameters in the pulsed dc magnetron argon discharge von Seo, Sang-Hun, In, Jung-Hwan, Chang, Hong-Young, Han, Jeon-Geon

Volltext

The radio frequency magnetic field effect on electron heating in a low frequency inductively coupled plasma von Chung, ChinWook, Seo, Sang-Hun, Chang, Hong-Young

Volltext

Electron transport in the downstream region of planar unbalanced magnetron discharge von Seo, Sang-Hun, Chang, Hong-Young

Volltext

Effects of gate notching profile defect on performance characteristics of short-channel NMOSFET with channel length of 0.12 μm von Seo, Sang-Hun, Yang, Won-Suk, Kim, Sung-Jin, Ju, Jun-Yong, Kim, Joo-Young, Peak, Hyun-Chul, Park, Seung-Hyun, Kim, Seug-Gyu, Kim, Kyeong-Tae

Volltext

A novel double offset-implanted source/drain technology for reduction of gate-induced drain-leakage with 0.12-μm single-gate low-power SRAM device von Seo, Sang-Hun, Yang, Won-Suk, Lee, Han-Sin, Kim, Moo-Sung, Koh, Kwang-Ok, Park, Seung-Hyun, Kim, Kyeong-Tae

Volltext

Experimental investigation of plasma dynamics in dc and short-pulse magnetron discharges von Seo, Sang-Hun, In, Jung-Hwan, Chang, Hong-Young

Volltext

Determination of terbutaline enantiomers in human urine by capillary electrophoresis using hydroxypropyl-beta-cyclodextrin as a chiral selector von Kim, Kyeong Ho, Seo, Sang Hun, Kim, Hyun Ju, Jeun, Eun Young, Kang, Jong-Seong, Mar, Woongchon, Youm, Jeong Rok

Volltext

Efficient electron heating in short-pulsed magnetron discharges von Seo, Sang-Hun, In, Jung-Hwan, Chang, Hong-Young

Volltext

Anomalous behaviors of plasma parameters in unbalanced direct-current magnetron discharge von Seo, Sang-Hun, Chang, Hong-Young

Volltext

Characteristics of Cell Latch and Leakage Current at Standby State in 6-T Low-Power Static Random Access Memory (SRAM) Device von Seo, Sang-Hun, Yang, Won-Suk, Kim, Seug-Gyu, Kim, Kyeong-Tae

Volltext

A New Inside-Type Segmented Coil Antenna for Uniformity Control in a Large-Area Inductively Coupled Plasma von Pyung-Woo Lee, Pyung-Woo Lee, Sung-Sik Kim, Sung-Sik Kim, Sang-Hun Seo, Sang-Hun Seo, Choong-Seock Chang, Choong-Seock Chang, Hong-Young Chang, Hong-Young Chang, Takanori Ichiki, Takanori Ichiki, Yasuhiro Horiike, Yasuhiro Horiike

Volltext

Electron drift and the loss balance of charged particles in planar-unbalanced dc magnetron discharge von Seo, Sang-Hun, In, Jung-Hwan, Chang, Hong-Young

Volltext

Effects of a sheath boundary on electron energy distribution in Ar/He dc magnetron discharges von Seo, Sang-Hun, In, Jung-Hwan, Chang, Hong-Young

Volltext

Review of heating mechanism in inductively coupled plasma von Seo, Sang-Hun, Chung, ChinWook, Chang, Hong-Young

Volltext