Experimental Study of Irradiation of Thin Oxide and Mo/Si Multilayers by High Brightness Broadband VUV/UV Radiation and Their Degradation von Telekh, Victor D., Pavlov, Aleksei V., Kirillov, Daniil V., Vorob’ev, Evgeny V., Turyanskiy, Alexander G., Senkov, Viacheslav M., Tsygankov, Petr A., Parada-Becerra, Freddy F., Vesnin, Vladimir R., Skriabin, Andrei S.

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