Paradigm Changing Integration Technology for the Production of Flexible Electronics by Transferring Structures, Dies and Electrical Components from Rigid to Flexible Substrates von Selbmann, Franz, Paul, Soumya Deep, Satwara, Maulik, Roscher, Frank, Wiemer, Maik, Kuhn, Harald, Joseph, Yvonne

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Lignin Hydrogels as a Use Case for a New Miniaturized Chemical Sensing Platform Based on Suspended Gate Field Effect Transistors von Stapf, Marieke, Komenko, Vladislav, Nong, Johanna Phuong, Adam, Jörg, Selbmann, Franz, Kravchenko, Andrey, Bremer, Martina, Fischer, Steffen, Knobloch, Klaus, Joseph, Yvonne

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Investigation of biocompatible Parylene as triboelectric layer for wearable energy harvesting von Selbmann, Franz, Baum, Mario, Bobinger, Marco, Gottwald, Markus, Wiemer, Maik, Kuhn, Harald

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Membrane-Based NEMS/MEMS Biosensors von Stapf, Hannes, Selbmann, Franz, Joseph, Yvonne, Rahimi, Parvaneh

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Hot Embossing to Fabricate Parylene-Based Microstructures and Its Impact on the Material Properties von Glauche, Florian, Selbmann, Franz, Guttmann, Markus, Schneider, Marc, Hengsbach, Stefan, Joseph, Yvonne, Kuhn, Harald

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Ligninsulfonate-based hydrogel films for ion sensing von Nong, Johanna Phuong, Nawroth, Paul, Selbmann, Franz, Bremer, Martina, Günther, Björn, Adam, Jörg, Joseph, Yvonne, Fischer, Steffen

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Impact of Non-Accelerated Aging on the Properties of Parylene C von Selbmann, Franz, Scherf, Christina, Langenickel, Jörn, Roscher, Frank, Wiemer, Maik, Kuhn, Harald, Joseph, Yvonne

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Low-Temperature Parylene-Based Adhesive Bonding Technology for 150 and 200 mm Wafers for Fully Biocompatible and Highly Reliable Microsystems von Selbmann, Franz, Baum, Mario, Meinecke, Christoph, Wiemer, Maik, Kuhn, Harald, Joseph, Yvonne

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(Invited) Parylene C Based Adhesive Bonding on 6" and 8" Wafer Level for the Realization of Highly Reliable and Fully Biocompatible Microsystems von Selbmann, Franz, Baum, Mario, Meinecke, Christoph, Wiemer, Maik, Otto, Thomas, Joseph, Yvonne

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Sealing of glass with titanium by glass pressing at the softening point von Winkler, Sebastian, Edelmann, Jan, Günther, Daniel, Wieland, Sebastian, Selbmann, Franz, Baum, Mario, Schubert, Andreas

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Study on TSV isolation liners for a Via Last approach with the use in 3D-WLP for MEMS von Hofmann, Lutz, Fischer, Tobias, Werner, Thomas, Selbmann, Franz, Rennau, Michael, Ecke, Ramona, Schulz, Stefan E., Geßner, Thomas

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Advances in Parylene Adhesive Bonding for the Realization of Biocompatible Microsystems von Selbmann, Franz, Roscher, Frank, Wiemer, Maik, Kuhn, Harald, Joseph, Yvonne

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DEVICE FOR COATING A STRIP-SHAPED SUBSTRATE WITH A PARYLENE LAYER von TOP, Michiel, SELBMANN, Franz, TÖRKER, Emmy

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A Parylene-Based Ultra-Thin Printed Circuit Board As a New Platform for Flexible Sensors and Wearables von Selbmann, Franz, Roscher, Frank, Gueth, Frederic, Wiemer, Maik, Kuhn, Harald, Joseph, Yvonne

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SUSPENDED GATE FET FOR CHEMICAL OR BIOLOGICAL APPLICATIONS von KRAVCHENKO, Andrey, SELBMANN, Franz, ZICKNER, Marieke, JOSEPH, Yvonne, KOMENKO, Vladislav

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Solid-State pH Sensors for Mine Water Monitoring von Güth, Frederic, Selbmann, Franz, Miersch, Christian, Árki, Pál, Joseph, Yvonne

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(Invited) Parylene C Based Adhesive Bonding on 6” and 8” Wafer Level for the Realization of Highly Reliable and Fully Biocompatible Microsystems von Selbmann, Franz, Baum, Mario, Meinecke, Christoph, Wiemer, Maik, Otto, Thomas, Joseph, Yvonne

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BARRIER LAYER SYSTEM AND METHOD FOR PRODUCING A BARRIER LAYER SYSTEM von Törker, Emmy, Selbmann, Franz, Wiemer, Maik, Keibler-Willner, Claudia, Baum, Mario

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BARRIER LAYER SYSTEM AND METHOD FOR PRODUCING A BARRIER LAYER SYSTEM von BAUM, Mario, SELBMANN, Franz, KEIBLER-WILLNER, Claudia, TÖRKER, Emmy, WIEMER, Maik

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Sealing of glass with titanium by glass pressing at the softening point von Winkler, Sebastian, Edelmann, Jan, Günther, Daniel, Wieland, Sebastian, Selbmann, Franz, Baum, Mario, Schubert, Andreas

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