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  1. 1
    Structural analysis of hydrogenated amorphous carbon nitride films formed from the decomposition of CH3CN in the microwave discharge flow of Ar

    Structural analysis of hydrogenated amorphous carbon nitride films formed from the decomposition of CH3CN in the microwave discharge flow of Ar von Ito, Haruhiko, Sekizaki, Chitose, Fukuhara, Sho, Saitoh, Hidetoshi


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  2. 2
    Structural analysis of hydrogenated amorphous carbon nitride films formed from the decomposition of CH 3 CN in the microwave discharge flow of Ar

    Structural analysis of hydrogenated amorphous carbon nitride films formed from the decomposition of CH 3 CN in the microwave discharge flow of Ar von Ito, Haruhiko, Sekizaki, Chitose, Fukuhara, Sho, Saitoh, Hidetoshi


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  3. 3
    Structural analysis of a-CNx:H films fabricated from the decomposition of CH3CN induced by the microwave plasma of Ar

    Structural analysis of a-CNx:H films fabricated from the decomposition of CH3CN induced by the microwave plasma of Ar von Sekizaki, Chitose, Dong, Fu, Saitoh, Hidetoshi, Ito, Haruhiko


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  4. 4
    Structural analysis of a-CNx:H films fabricated from the decomposition of CH3CN induced by the microwave plasma of Ar

    Structural analysis of a-CNx:H films fabricated from the decomposition of CH3CN induced by the microwave plasma of Ar von Sekizaki, Chitose, Dong, Fu, Saitoh, Hidetoshi, Ito, Haruhiko


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  5. 5
    Structural analysis of a-CNx:H films fabricated from the decomposition of CH3CN

    Structural analysis of a-CNx:H films fabricated from the decomposition of CH3CN von Sekizaki, Chitose, Fu, Dong, Saito, Hidetoshi, Ito, Haruhiko


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  6. 6
    CH3CNのArマイクロ波プラズマ分解で生成したa-CNx:H薄膜の構造解析

    CH3CNのArマイクロ波プラズマ分解で生成したa-CNx:H薄膜の構造解析 von 関崎, 千歳, 董, 福, 斎藤, 秀俊, 伊藤, 治彦


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  7. 7
    CH3CNのArマイクロ波プラズマ分解で生成したa-CNx:H薄膜の構造解析

    CH3CNのArマイクロ波プラズマ分解で生成したa-CNx:H薄膜の構造解析 von 関崎, 千歳, 董, 福, 斎藤, 秀俊, 伊藤, 治彦


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  8. 8
    CH3CNのArマイクロ波プラズマ分解で生成したa-CNx:H薄膜の構造解析

    CH3CNのArマイクロ波プラズマ分解で生成したa-CNx:H薄膜の構造解析 von 関崎, 千歳, 董, 福, 斎藤, 秀俊, 伊藤, 治彦


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