Cost-effective equipment for surface pre-treatment for cleaning and excitation of substrates in semiconductor technology von Weber, Dominik, Heimburger, Robert, Schondelmaier, Gianina, Junghans, Toni, Zetzl, Annika, Zahn, Dietrich R. T., Schondelmaier, Daniel

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Use of beam-shaping optics for wafer-scaled nanopatterning in laser interference lithography von Weber, Dominik, Heimburger, Robert, Hildebrand, Dirk, Junghans, Toni, Schondelmaier, Gianina, Walther, Christian, Schondelmaier, Daniel

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Numerical characterization and experimental verification of an in-plane MEMS-actuator with thin-film aluminum heater von Meszmer, Peter, Hiller, Karla, Hartmann, Steffen, Shaporin, Alexey, May, Daniel, Rodriguez, Raul David, Arnold, Jörg, Schondelmaier, Gianina, Mehner, Jan, Zahn, Dietrich R. T., Wunderle, Bernhard

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Piezoresistive force sensor and thermal actuators usage as applications to nanosystems manipulation: Design, simulations, technology and experiments von Schondelmaier, G., Hartmann, S., May, D., Shaporin, A., Voigt, S., Rodriguez, R. D., Gordan, O. D., Zahn, D. R. T., Mehner, J., Hiller, K., Wunderle, B.

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