Piezoelectricity in Y0.09Al0.91N thin films von Schlögl, M., Schneider, M., Schmid, U.

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A numerical method to determine the displacement spectrum of micro-plates in viscous fluids von Gesing, A., Platz, D., Schmid, U.

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Accuracy and precision of resonant piezoelectric MEMS viscosity sensors in highly viscous bituminous materials von Alasatri, S., Schneider, M., Mirwald, J., Hofko, B., Schmid, U.

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Static and dynamic performance of bistable MEMS membranes von Dorfmeister, M., Schneider, M., Schmid, U.

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Influence of the AlN/Pt-ratio on the electro-mechanical properties of multilayered AlN/Pt thin film strain gauges at high temperatures von Schmid, P., Triendl, F., Zarfl, C., Schwarz, S., Artner, W., Schneider, M., Schmid, U.

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Electro-mechanical properties of multilayered aluminum nitride and platinum thin films at high temperatures von Schmid, P., Triendl, F., Zarfl, C., Schwarz, S., Artner, W., Schneider, M., Schmid, U.

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High finesse microcavities in the optical telecom O-band von Fait, J., Putz, S., Wachter, G., Schalko, J., Schmid, U., Arndt, M., Trupke, M.

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3D characterisation of piezoelectric bistable MEMS membranes during switching von Dorfmeister, M., Schneider, M., Schmid, U.

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Mechanical and electrical characterization of resonant piezoelectric microbridges for strain sensing von Schlögl, M., Köpl, S., Hiesberger, J., Schneider, M., Schmid, U.

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Theoretical and experimental investigations of barrier height inhomogeneities in poly-Si/4H-SiC heterojunction diodes von Triendl, F, Pfusterschmied, G, Pobegen, G, Konrath, J P, Schmid, U

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Impact of annealing temperature on the mechanical and electrical properties of sputtered aluminum nitride thin films von Gillinger, M., Schneider, M., Bittner, A., Nicolay, P., Schmid, U.

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The influence of sputter deposition parameters on piezoelectric and mechanical properties of AlN thin films von Ababneh, A., Schmid, U., Hernando, J., Sánchez-Rojas, J.L., Seidel, H.

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Influence of metallic catalyst and doping level on the metal assisted chemical etching of silicon von Backes, A., Bittner, A., Leitgeb, M., Schmid, U.

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α-phase PVDF MEMS cantilever excited by electrostriction and evaluated up to 160 °C in air by laser-Doppler vibrometry von Maier, F. J., Schneider, M., Ullmann, P., Hafner, J., Schmid, U.

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Impact of doping level on the metal assisted chemical etching of p-type silicon von Backes, A., Schmid, U.

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A thermoelectric-based energy harvesting module with extended operational temperature range for powering autonomous wireless sensor nodes in aircraft von Elefsiniotis, A., Kokorakis, N., Becker, T., Schmid, U.

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Temperature and ambient atmosphere dependent electrical characterization of sputtered IrO2/TiO2/IrO2 capacitors von Maier, F. J., Schneider, M., Artemenko, A., Kromka, A., Stöger-Pollach, M., Schmid, U.

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Thermoelectric Energy Harvesting Using Phase Change Materials (PCMs) in High Temperature Environments in Aircraft von Elefsiniotis, A., Becker, Th, Schmid, U.

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Improved piezoelectric constants of sputtered aluminium nitride thin films by pre-conditioning of the silicon surface von Schneider, M, Bittner, A, Schmid, U

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Magnetic and microstructural properties of sputter deposited Cr-doped aluminum nitride thin films on silicon substrates von Wistrela, E., Bittner, A., Schneider, M., Reissner, M., Schmid, U.

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