추출된 이온 빔의 각도 제어를 위한 미스매치된 광학계 von CLAY NEVIN, LIKHANSKII ALEXANDRE, MAHALINGAM SUDHAKAR, SCHEUER JAY T

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추출 이온 빔의 균일성을 제어하기 위한 디바이스 von WRIGHT GRAHAM, LIKHANSKII ALEXANDRE, KURUNCZI PETER F, SCHEUER JAY T

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Magnetic nozzle design for coaxial plasma accelerators von Hoyt, R.P., Scheuer, J.T., Schoenberg, K.F., Gerwin, R.A., Moses, R.W., Henins, I.

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가변 두께 이온 공급원 추출 플레이트 von KOO BON WOONG, WRIGHT GRAHAM, LIKHANSKII ALEXANDRE, PEREL ALEXANDER S, KURUNCZI PETER F, LINDBERG ROBERT C, SCHEUER JAY T

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빔라인 이온 주입기 및 빔라인 이온 주입기를 동작시키는 방법 von KOO BON WOONG, HERMANSON ERIC D, HSIEH TSEH JEN, STACY THOMAS, SCHEUER JAY T

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MISMATCHED OPTICS FOR ANGULAR CONTROL OF EXTRACTED ION BEAM von SCHEUER, Jay T, MAHALINGAM, Sudhakar, LIKHANSKII, Alexandre, CLAY, Nevin

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ION IMPLANTATION SYSTEM AND METHOD OF IN-SITU PLASMA CLEANING von DOWNEY RYAN, KURUNCZI PETER, LIKHANSKII ALEXANDRE, ANGLIN KEVIN, HOLBER WILLIAM M, LEE WILLIAM DAVIS, SCHEUER JAY T

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감소된 입자 생성을 제공하는 정전 필터 von SINCLAIR FRANK, LIKHANSKII ALEXANDRE, CUCCHETTI ANTONELLA, HERMANSON ERIC D, LINDBERG ROBERT C, SCHEUER JAY T

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MISMATCHED OPTICS FOR ANGULAR CONTROL OF EXTRACTED ION BEAM von SCHEUER, Jay T, MAHALINGAM, Sudhakar, LIKHANSKII, Alexandre, CLAY, Nevin

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Mismatched optics for angular control of extracted ion beam von Scheuer, Jay T, Clay, Nevin, Likhanskii, Alexandre, Mahalingam, Sudhakar

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MISMATCHED OPTICS FOR ANGULAR CONTROL OF EXTRACTED ION BEAM von SCHEUER, Jay T, MAHALINGAM, Sudhakar, LIKHANSKII, Alexandre, CLAY, Nevin

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Mismatched Optics for Angular Control of Extracted Ion Beam von Scheuer, Jay T, Clay, Nevin, Likhanskii, Alexandre, Mahalingam, Sudhakar

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Device To Control Uniformity Of Extraction Ion Beam von Scheuer, Jay T, Wright, Graham, Kurunczi, Peter F, Likhanskii, Alexandre

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DEVICE TO CONTROL UNIFORMITY OF EXTRACTION ION BEAM von SCHEUER, Jay T, KURUNCZI, Peter F, LIKHANSKII, Alexandre, WRIGHT, Graham

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USJ formation using pulsed plasma doping von Scheuer, J.T, Lenoble, D, Reynard, J.-P, Lallement, F, Grouillet, A, Arevalo, A, Distaso, D, Downey, D, Fang, Z, Godet, L, Koo, B.W, Miller, T, Weeman, J

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XRAY DIFFRACTION ANGLE VERIFICATION IN AN ION IMPLANTER von Sinclair, Frank, Scheuer, Jay T, Krause, Stephen, Rosen, Gary J, Gaucher, Matthew

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XRAY DIFFRACTION ANGLE VERIFICATION IN AN ION IMPLANTER von GAUCHER, Matthew, SCHEUER, Jay T, KRAUSE, Stephen, ROSEN, Gary J, SINCLAIR, Frank

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이온 빔 장치 내의 오염 제어를 위한 장치 및 방법 von LIKHANSKII ALEXANDRE, LEE WILLIAM DAVIS, SCHEUER JAY T

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XRAY DIFFRACTION ANGLE VERIFICATION IN AN ION IMPLANTER von GAUCHER, Matthew, PALIT, Pratim, SCHEUER, Jay T, KRAUSE, Stephen, HALL, Daniel, ROSEN, Gary J, SINCLAIR, Frank, LOWDER, Jonathan

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Particle yield via beam-line pressure control von Scheuer, Jay T, Stacy, Thomas, Koo, Bon-Woong, Hsieh, Tseh-Jen, Hermanson, Eric D

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