Programmable thermal processing module for semiconductor substrates von El-Awady, K., Schaper, C.D., Kailath, T.

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Design of feedforward filters for improving tracking performances of existing feedback control systems von Kuen-Yu Tsai, Schaper, C.D., Kailath, T.

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Real-time predictive control of photoresist film thickness uniformity von Lay Lay Lee, Schaper, C.D., Weng Khuen Ho

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Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates von Weng Khuen Ho, Tay, A., Schaper, C.D.

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Nano-Imprint Lithography of 100nm Sized Patterns Using Water Soluble PVA, Poly(Vinyl Alcohol), Template von Lee, Heon, Jung, Gun Young, Yang, Ki Yeon, Hong, Sung Hoon, Schaper, C.D.

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Integrated bake/chill module with in situ temperature measurement for photoresist processing von Tay, A., Weng-Khuen Ho, Ai-Poh Loh, Khiang-Wee Lim, Tan, W.-W., Schaper, C.D.

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2002 best paper award von Lay Lay Lee, Schaper, C.D., Weng Khuen Ho

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Characterizing photolithographic linewidth sensitivity to process temperature variations for advanced resists using a thermal array von SCHAPER, C. D, EL-AWADY, K, KAILATH, T, TAY, A, LEE, L. L, HO, W. K, FULLER, S. E

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Decentralized control of wafer temperature for multizone rapid thermal processing systems von Schaper, C.D., Kailath, T., Yong Jin Lee

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Integrated bake/chill for photoresist processing von El-Awady, K., Schaper, C.D., Kailath, T.

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Identification of chemical processes using canonical variate analysis von Schaper, C.D., Larimore, W.E., Seborg, D.E., Mellichamp, D.A.

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Probabilistic approach to robust process control von Schaper, Charles D, Seborg, Dale E, Mellichamp, Duncan A

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Patterning SiO/sub 2/ layer using molecular transfer lithography (MxL) von Hatogai, T., Schaper, C.D., Fabian, R., Pease, W.

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Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks von Weng Khuen Ho, Tay, A., Schaper, C.D.

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Control systems for the nanolithography process von Schaper, C.D., El-Awady, K., Tay, A., Kailath, T.

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Applications of control and signal processing to the microlithographic process von Schaper, C.D., Kailath, T., El-Awady, K., Tay, A.

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Design of feedforward filters for improving tracking performances of existing feedback control systems von Kuen-Yu Tsai, Schaper, C.D., Kailath, T.

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Control strategy for temperature tracking in rapid thermal processing of semiconductor wafers von Park, P., Schaper, C.D., Kailath, T.

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Edge detection for optical image metrology using unsupervised neural network learning von Aghajan, H.K., Schaper, C.D., Kailath, T.

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Pain relief and quality-of-life improvement after spinal cord stimulation in painful diabetic polyneuropathy: a pilot study von Pluijms, W.A., Slangen, R., Bakkers, M., Faber, C.G., Merkies, I.S.J., Kessels, A.G., Dirksen, C.D., Joosten, E.A., Reulen, J.P.H., van Dongen, R.T., Schaper, N.C., van Kleef, M.

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