Dynamical Two-Mode Squeezing of Thermal Fluctuations in a Cavity Optomechanical System von Pontin, A, Bonaldi, M, Borrielli, A, Marconi, L, Marino, F, Pandraud, G, Prodi, G A, Sarro, P M, Serra, E, Marin, F

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Quantum Signature of a Squeezed Mechanical Oscillator von Chowdhury, A., Vezio, P., Bonaldi, M., Borrielli, A., Marino, F., Morana, B., Prodi, G. A., Sarro, P. M., Serra, E., Marin, F.

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Microfabricated tuneable and transferable porous PDMS membranes for Organs-on-Chips von Quirós-Solano, W. F., Gaio, N., Stassen, O. M. J. A., Arik, Y. B., Silvestri, C., Van Engeland, N. C. A., Van der Meer, A., Passier, R., Sahlgren, C. M., Bouten, C. V. C., van den Berg, A., Dekker, R., Sarro, P. M.

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Two-phase cooling of light emitting diode for higher light output and increased efficiency von Ye, H., Mihailovic, M., Wong, C.K.Y., van Zeijl, H.W., Gielen, A.W.J., Zhang, G.Q., Sarro, P.M.

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Mixed motion in deterministic ratchets due to anisotropic permeability von Kulrattanarak, T., van der Sman, R.G.M., Lubbersen, Y.S., Schroën, C.G.P.H., Pham, H.T.M., Sarro, P.M., Boom, R.M.

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Microfabrication of large-area circular high-stress silicon nitride membranes for optomechanical applications von Serra, E., Bawaj, M., Borrielli, A., Di Giuseppe, G., Forte, S., Kralj, N., Malossi, N., Marconi, L., Marin, F., Marino, F., Morana, B., Natali, R., Pandraud, G., Pontin, A., Prodi, G. A., Rossi, M., Sarro, P. M., Vitali, D., Bonaldi, M.

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Tube-shaped Pirani gauge for in situ hermeticity monitoring of SiN thin-film encapsulation von Santagata, F, Creemer, J F, Iervolino, E, Sarro, P M

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Through-wafer copper electroplating for three-dimensional interconnects von Nguyen, N T, Boellaard, E, Pham, N P, Kutchoukov, V G, Craciun, G, Sarro, P M

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Continuous deep reactive ion etching of tapered via holes for three-dimensional integration von Li, R, Lamy, Y, Besling, W F A, Roozeboom, F, Sarro, P M

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Miniaturized engineered heart tissues from hiPSC-derived triple cell type co-cultures to study human cardiac function von Windt, L.M., Wiendels, M., Dostanić, M., Bellin, M., Sarro, P.M., Mastrangeli, M., Mummery, C.L., van Meer, B.J.

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Effect of air-loading on the performance limits of graphene microphones von Pezone, R., Baglioni, G., van Ruiten, C., Anzinger, S., Wasisto, H. S., Sarro, P. M., Steeneken, P. G., Vollebregt, S.

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Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications von Connolly, E.J., O’Halloran, G.M., Pham, H.T.M., Sarro, P.M., French, P.J.

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An analytical model and verification for MEMS Pirani gauges von Santagata, F, Iervolino, E, Mele, L, van Herwaarden, A W, Creemer, J F, Sarro, P M

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Fabrication of a CMOS compatible pressure sensor for harsh environments von Pakula, L S, Yang, H, Pham, H T M, French, P J, Sarro, P M

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Fully back-end TSV process by Cu electro-less plating for 3D smart sensor systems von Santagata, F, Farriciello, C, Fiorentino, G, van Zeijl, H W, Silvestri, C, Zhang, G Q, Sarro, P M

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Active feedback cooling of a SiN membrane resonator by electrostatic actuation von Borrielli, A., Bonaldi, M., Serra, E., Sarro, P. M., Morana, B.

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Micromachined nanofiltration modules for lab-on-a-chip applications von Shen, C, Mokkapati, V R S S, Pham, H T M, Sarro, P M

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MEMS silicon-based micro-evaporator von Mihailovic, M, Rops, C M, Hao, J, Mele, L, Creemer, J F, Sarro, P M

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Superconducting High-Aspect Ratio Through-Silicon Vias With DC-Sputtered Al for Quantum 3D Integration von Alfaro-Barrantes, J. A., Mastrangeli, M., Thoen, D. J., Visser, S., Bueno, J., Baselmans, J. J. A., Sarro, P. M.

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Calorimeter chip calibration for thermal characterization of liquid samples von Iervolino, E., van Herwaarden, A.W., Sarro, P.M.

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