Influence of zirconium addition on microstructure, hardness and oxidation resistance of tantalum nitride thin films von Santos, Jonh Yago Erikson, Terto, André Romão, Ramirez, Daniel Angel, Santos, Júlio César Valeriano dos, Brito, Beatriz dos Santos Silva, Sabino, Luís Fernando, Dias, Iago Lemos, Hübler, Roberto, Tentardini, Eduardo Kirinus

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