Atomic layer deposition of tantalum oxide thin films for their use as diffusion barriers in microelectronic devices von Lintanf-Salaün, A., Mantoux, A., Djurado, E., Blanquet, E.

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A very promising piezoelectric property of Ta2O5 thin films. II: Birefringence and piezoelectricity von AUDIER, M, CHENEVIER, B, ROUSSEL, H, VINCENT, L, PENA, A, SALAÜN, A. Lintanf

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Second order incommensurate phase transition in 25L-Ta2O5 von AUDIER, M, CHENEVIER, B, ROUSSEL, H, LINTANF SALAÜN, A

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A very promising piezoelectric property of Ta2O5 thin films. I: Monoclinic-trigonal phase transition von AUDIER, M, CHENEVIER, B, ROUSSEL, H, VINCENT, L, PENA, A, LINTANF SALAÜN, A

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Fabrication by electrostatic spray deposition and structural investigation of ultra thin and dense zirconia films von Lintanf-Salaün, A., Djurado, E.

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ESD and ALD Depositions of Ta[sub 2]O[sub 5] Thin Films Investigated as Barriers to Copper Diffusion for Advanced Metallization von Salaün, A. Lintanf, Mantoux, A., Blanquet, E., Djurado, E.

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ESD and ALD Depositions of Ta2O5 Thin Films Investigated as Barriers to Copper Diffusion for Advanced Metallization von Lintanf-Salaün, Amélie, Mantoux, Arnaud, Blanquet, Elisabeth, Djurado, Elisabeth

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Second order incommensurate phase transition in 25L-Ta 2O 5 von Audier, M., Chenevier, B., Roussel, H., Lintanf Salaün, A.

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A very promising piezoelectric property of thin films. I: Monoclinic–trigonal phase transition von Audier, M., Chenevier, B., Roussel, H., Vincent, L., Peña, A., Lintanf Salaün, A.

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A very promising piezoelectric property of Ta 2 O 5 thin films. I: Monoclinic–trigonal phase transition von Audier, M., Chenevier, B., Roussel, H., Vincent, L., Peña, A., Lintanf Salaün, A.

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A very promising piezoelectric property of Ta 2O 5 thin films. II: Birefringence and piezoelectricity von Audier, M., Chenevier, B., Roussel, H., Vincent, L., Peña, A., Lintanf Salaün, A.

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