Preface-Japan Vacuum Show "VACUUM 2015" von SAKAI, Junro

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Preface^|^mdash;Japan Vacuum Show ^|^ldquo;VACUUM2014^|^rdquo;^|^mdash von SAKAI, Junro

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Mourning for Dr. Zenjiro ODA von SAKAI, Junro

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Preface—Japan Vacuum Show “VACUUM 2015” von SAKAI, Junro

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Preface—Japan Vacuum Show “VACUUM2014” von SAKAI, Junro

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Mourning for Dr. Zenjiro ODA von SAKAI, Junro

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Characterization of stable fluorine-doped silicon oxide film prepared by biased helicon plasma chemical vapor deposition von TAMURA, T, INOUE, Y, SATOH, M, YOSHITAKA, H, SAKAI, J

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Influence of Gas Desorption from SiOF Film Prepared by High-Density-Plasma Chemical Vapor Deposition upon TiN/Ti Film von Tamura, Takahiro, Sakai, Junro, Satoh, Makoto

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Structural Analysis for Water Absorption of SiOF Films Prepared by High-Density-Plasma Chemical Vapor Deposition von Tamura, Takahiro, Sakai, Junro, Inoue, Yoichi, Satoh, Makoto, Yoshitaka, Hikaru

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Selective epitaxial growth of Si and Si1-xGex films by ultrahigh-vacuum chemical vapor deposition using Si2H6 and GeH4 von AKETAGAWA, K, TATSUMI, T, HIROI, M, NIINO, T, SAKAI, J

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Selective epitaxial growth by UHV-CVD using Si2H6 and Cl2 von TATSUMI, T, AKETAGAWA, K.-I, HIROI, M, SAKAI, J

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Structural and electrical properties for fluorine-doped silicon oxide films prepared by biased helicon-plasma chemical vapor deposition von TAMURA, T, SAKAI, J, SATOH, M, INOUE, Y, YOSHITAKA, H

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「VACUUM2015 真空展」開催にあたって von 酒井, 純朗

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The influence of Cl2 on Si1-xGex selective epitaxial growth and B-doping properties by UHV-CVD von AKETAGAWA, K.-I, TATSUMI, T, SAKAI, J

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Limitations of selective epitaxial growth conditions in gas-source MBE using Si2H6 von AKETAGAWA, K.-I, TATSUMI, T, SAKAI, J

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織田善次郎さんをしのんで von 酒井, 純朗

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VACUUM2014—真空展開催にあたって von 酒井, 純朗

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Selective Epitaxial Growth of Si and Si 1-x Ge x Films by Ultrahigh-Vacuum Chemical Vapor Deposition Using Si 2 H 6 and GeH 4 von Aketagawa, Ken-ichi, Tatsumi, Toru, Hiroi, Masayuki, Niino, Taeko, Junro Sakai, Junro Sakai

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In situ determination of Ba, Y, Cu and O2 flux by cold cathode discharge induced emission spectroscopy von Sakai, Junro, Kato, Kazunori, Hirama, Kimiaki, Murakami, Shun-ichi, Ishida, Tetsuo

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Molecular beam flux monitor using cold cathode discharge induced emission spectroscopy von SAKAI, J, GUORONG CHEN, HIRAMA, K, MURAKAMI, S.-I, ISHIDA, T

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