High mobility MISFET with low trapped charge in HfSiO films von Morioka, Ayuka, Watanabe, Hirohito, Miyamura, Makoto, Tatsumi, Toru, Saitoh, Motohumi, Ogura, Takashi, Iwamoto, Toshiyuki, Ikarashi, Taeko, Saito, Yukishige, Okada, Yuko, Watanabe, Heiji, Mochiduki, Yasunori, Mogami, Tohru

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