Decoupling Control Method for High-Precision Stages using Multiple Actuators considering the Misalignment among the Actuation Point, Center of Gravity, and Center of Rotation von Ohnishi, Wataru, Fujimoto, Hiroshi, Sakata, Koichi, Suzuki, Kazuhiro, Saiki, Kazuaki

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Self Resonance Cancellation Techniques for a Two-Mass System and Its Application to a Large-Scale Stage von Sakata, Koichi, Asaumi, Hiroyoshi, Hirachi, Kazuyuki, Saiki, Kazuaki, Fujimoto, Hiroshi

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A Study on High-Speed and High-Precision Tracking Control of Large-Scale Stage Using Perfect Tracking Control Method Based on Multirate Feedforward Control von Saiki, K., Hara, A., Sakata, K., Fujimoto, H.

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Basic examination of simultaneous optimization of mechanical and control design for gantry-type precision stage modeled as two-mass 4-DOF system von Seki, Y, Fujimoto, H, Hara, A, Yamanaka, T, Saiki, K

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Improvement of Fast and Precise Positioning of Large-Scale High-Precision Step-Stage Based on Vibration Suppression PTC von Sakata, K., Fujimoto, H., Shimoyama, T., Saiki, K.

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Method of Shortening Settling Time Using Final State Control for High-Precision Stage with Decouplable Structure of Fine and Coarse Parts von YAZAKI, YUMA, FUJIMOTO, HIROSHI, HORI, YOICHI, SAKATA, KOICHI, HARA, ATSUSHI, SAIKI, KAZUAKI

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Proposal of attitude control for high-precision stage by compensating nonlinearity and coupling of Euler's equation and rotational kinematics von Ohnishi, Wataru, Fujimoto, Hiroshi, Sakata, Koichi, Suzuki, Kazuhiro, Saiki, Kazuaki

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Frequency separation self resonance cancellation for vibration suppression control of a large-scale stage using multiple position sensors von Sakata, Koichi, Asaumi, Hiroyoshi, Hirachi, Kazuyuki, Saiki, Kazuaki, Fujimoto, Hiroshi

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Call me Mr. Control Guy!(<Special Issue>Control Engineer Needed!) von SAIKI, Kazuaki

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Application of Perfect Tracking Control to Large-Scale High-Precision Stage von Fujimoto, Hiroshi, Sakata, Koichi, Saiki, Kazuaki

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Design fabrication and control of 4-DOF high-precision stage von Sakata, Koichi, Fujimoto, Hiroshi, Hara, Atsushi, Ohtomo, Takeshi, Saiki, Kazuaki

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A study on high-speed and high-precision tracking control of large-scale stage using perfect tracking control method based on multirate feedforward control von Kazuaki Saiki, Atsushi Hara, Koichi Sakata, Hiroshi Fujimoto

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Design fabrication of high-precision stage and ultrahigh-speed nanoscale positioning von Sakata, K., Fujimoto, H., Hara, A., Saiki, K.

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Basic examination on simultaneous optimization of mechanism and control for high precision single axis stage and experimental verification von Hara, A., Saiki, K., Sakata, K., Fujimoto, H.

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Positioning of large-scale high-precision viscoelastic stage based on vibration suppression PTC von Saiki, K., Shimoyama, T., Sakata, K., Fujimoto, H.

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High-speed and high-precision tracking control of large-scale stage using perfect tracking control with disturbance observer von Saiki, K., Hirachi, K., Sakata, K., Fujimoto, H.

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DRIVING SYSTEM AND DRIVING METHOD, LIGHT EXPOSURE DEVICE AND LIGHT EXPOSURE METHOD, AND DRIVING SYSTEM DESIGNING METHOD von SAKATA, Koichi, SAIKI, Kazuaki, FUJIMOTO, Hiroshi

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Drive control method for moving body, exposure method, robot control method, drive control apparatus, exposure apparatus and robot apparatus von SAIKI KAZUAKI

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CONTROL PROGRAM, CONTROL METHOD AND INFORMATION PROCESSING EQUIPMENT von NAKANO EMIKO, SAIKI KAZUAKI

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DRIVING SYSTEM AND DRIVING METHOD, LIGHT EXPOSURE DEVICE AND LIGHT EXPOSURE METHOD, AND DRIVING SYSTEM DESIGNING METHOD von SAKATA, Koichi, SAIKI, Kazuaki, FUJIMOTO, Hiroshi

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