Precise reactive ion etching of Ta absorber on X-ray masks von NAKAISHI, M, SUGISHIMA, K

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Effect of sputtering on ferromagnet-oxide-silicon spin injection contacts von Gundapaneni, Suresh, Ganguly, Swaroop, Van Roy, Willem, Kaushal, Sanjeev, Sugishima, Kenji

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Anomalous etching residues of sputter-deposited Ta upon reactive ion etching using chlorine-based plasmas von NAKAISHI, M, YAMADA, M, KONDO, K, YAMABE, M, SUGISHIMA, K

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Improvements of stress controllability and radiation resistance by adding carbon to boron-nitride von YAMADA, M, NAKAISHI, M, SUGISHIMA, K

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An etching mechanism of Ta by chlorine-based plasmas von YAMADA, M, NAKAISHI, M, SUGISHIMA, K

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Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool von Kaushal Sanjeev, Sugishima Kenji, Patel Sukesh Janubhai

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Autonomous biologically based learning tool von PATEL SUKESH JANUBHAI, SUGISHIMA KENJI, KAUSHAL SANJEEV

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Method and system for detection of tool performance degradation and mismatch von SUGISHIMA KENJI, PATEL SUKESH J, KAUSHAL SANJEEV

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Tool performance by linking spectroscopic information with tool operational parameters and material measurement information von PATEL SUKESH JANUBHAI, SUGISHIMA KENJI, KAUSHAL SANJEEV

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METHOD AND APPARATUS FOR SELF-LEARNING AND SELF-IMPROVING A SEMICONDUCTOR MANUFACTURING TOOL von PATEL SUKESH JANUBHAI, SUGISHIMA KENJI, KAUSHAL SANJEEV

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Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool von PATEL SUKESH JANUBHAI, SUGISHIMA KENJI, KAUSHAL SANJEEV

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Method and system for detection of tool performance degradation and mismatch von PATEL SUKESH JANUBHAI, SUGISHIMA KENJI, KAUSHAL SANJEEV

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Lithography for micro-electronics von Goto, Shunji, Sugishima, Kenji, Ban, Yasutaka

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IMPROVING TOOL PERFORMANCE BY LINKING SPECTROSCOPIC INFORMATION WITH TOOL OPERATIONAL PARAMETERS AND MATERIAL MEASUREMENTS von PATEL, SUKESH JANUBHAI, SUGISHIMA, KENJI, KAUSHAL, SANJEEV

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METHOD AND APPARATUS FOR SELF-LEARNING AND SELF-IMPROVING A SEMICONDUCTOR MANUFACTURING TOOL von PATEL SUKESH JANUBHAI, SUGISHIMA KENJI, KAUSHAL SANJEEV

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Method and apparatus for self-learning and self-improving a semiconductor manufacturing tool von PATEL SUKESH JANUBHAI, SUGISHIMA KENJI, KAUSHAL SANJEEV

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Process technologies for Ta/SiC X-ray masks von YAMADA, M, KONDO, K, NAKAISHI, M, KUDO, J, SUGISHIMA, K

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METHOD AND SYSTEM FOR SELF-LEARNING AND SELF-IMPROVING A SEMICONDUCTOR MANUFACTURING TOOL von PATEL, SUKESH JANUBHAI, SUGISHIMA, KENJI, KAUSHAL, SANJEEV

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AUTONOMOUS BIOLOGICALLY BASED LEARNING TOOL von PATEL SUKESH JANUBHAI, SUGISHIMA KENJI, KAUSHAL SANJEEV

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IMPROVING TOOL PERFORMANCE BY LINKING SPECTROSCOPIC INFORMATION WITH TOOL OPERATIONAL PARAMETERS AND MATERIAL MEASUREMENTS von PATEL, SUKESH JANUBHAI, SUGISHIMA, KENJI, KAUSHAL, SANJEEV

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