Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers von Bajt, Saša, Stearns, Daniel G., Kearney, Patrick A.

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Localized defects in multilayer coatings von Stearns, D.G., Mirkarimi, P.B., Spiller, E.

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High-performance Mo-Si multilayer coatings for extreme-ultraviolet lithography by ion-beam deposition von Spiller, Eberhard, Baker, Sherry L, Mirkarimi, Paul B, Sperry, Victor, Gullikson, Eric M, Stearns, Daniel G

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Nonspecular x-ray scattering in a multilayer-coated imaging system von Stearns, D. G., Gaines, D. P., Sweeney, D. W., Gullikson, E. M.

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High-temperature stability multilayers for extreme-ultraviolet condenser optics von Bajt, Sasa, Stearns, Daniel G

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Investigating the growth of localized defects in thin films using gold nanospheres von Mirkarimi, P. B., Stearns, D. G.

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X-RAY-SCATTERING FROM INTERFACIAL ROUGHNESS IN MULTILAYER STRUCTURES von STEARNS, DG

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The scattering of x rays from nonideal multilayer structures von STEARNS, D. G

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Stochastic model for thin film growth and erosion von STEARNS, D. G

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Multilayer mirror technology for soft-x-ray projection lithography von Stearns, D G, Rosen, R S, Vernon, S P

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Method for repairing Mo/Si multilayer thin film phase defects in reticles for extreme ultraviolet lithography von Mirkarimi, P. B., Stearns, D. G., Baker, S. L., Elmer, J. W., Sweeney, D. W., Gullikson, E. M.

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An ion-assisted Mo-Si deposition process for planarizing reticle substrates for extreme ultraviolet lithography von Mirkarimi, P.B., Spiller, E.A., Stearns, D.G., Sperry, V., Baker, S.L.

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Thermally induced structural modification of Mo-Si multilayers von STEARNS, D. G, STEARNS, M. B, CHENG, Y, STITH, J. H, CEGLIO, N. M

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Advancing the ion beam thin film planarization process for the smoothing of substrate particles von Mirkarimi, P.B., Spiller, E., Baker, S.L., Robinson, J.C., Stearns, D.G., Liddle, J.A., Salmassi, F., Liang, T., Stivers, A.R.

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Correction of figure errors on optical surfaces by laser-induced contraction of Mo/Si multilayers von Hau-Riege, Stefan P, Stearns, Daniel G

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Nonspecular scattering from extreme ultraviolet multilayer coatings von Stearns, D.G., Gullikson, E.M.

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OPTIMIZATION OF GROWTH-CONDITIONS OF VAPOR-DEPOSITED MO/SI MULTILAYERS von STEARNS, MB, CHANG, CH, STEARNS, DG

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High-resolution electron microscopy study of x-ray multilayer structures von PETFORD-LONG, A. K, STEARNS, M. B, CHANG, C.-H, NUTT, S. R, STEARNS, D. G, CEGLIO, N. M, HAWRYLUK, A. M

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Silicide layer growth rates in Mo/Si multilayers von Rosen, R S, Vernon, D S, Stearns, G, Viliardos, M A, Kassner, M E, Cheng, Y

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Ion-assisted sputter deposition of molybdenum-silicon multilayers von Vernon, S P, Stearns, D G, Rosen, R S

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