High-performance Mo-Si multilayer coatings for extreme-ultraviolet lithography by ion-beam deposition von Spiller, Eberhard, Baker, Sherry L, Mirkarimi, Paul B, Sperry, Victor, Gullikson, Eric M, Stearns, Daniel G

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High-temperature stability multilayers for extreme-ultraviolet condenser optics von Bajt, Sasa, Stearns, Daniel G

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Multilayer X-ray mirrors - Interfacial roughness, scattering, and image quality von Spiller, Eberhard, Stearns, Daniel, Krumrey, Michael

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An ion-assisted Mo-Si deposition process for planarizing reticle substrates for extreme ultraviolet lithography von Mirkarimi, P.B., Spiller, E.A., Stearns, D.G., Sperry, V., Baker, S.L.

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Correction of figure errors on optical surfaces by laser-induced contraction of Mo/Si multilayers von Hau-Riege, Stefan P, Stearns, Daniel G

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Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers von Bajt, Saša, Stearns, Daniel G., Kearney, Patrick A.

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Silicide layer growth rates in Mo/Si multilayers von Rosen, R S, Vernon, D S, Stearns, G, Viliardos, M A, Kassner, M E, Cheng, Y

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Imaging x-ray multilayer structures using cross-sectional high resolution electron microscopy von YUANDA CHENG, SMITH, D. J, STEARNS, M. B, STEARNS, D. G

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SUBMERSION TRANSDUCER WITH ADJUSTABLE FOCUS von PEISLEY, David, STEARNS, Richard, STEARNS, Daniel, WHALEN, William, FATHOLLAHI, Bahram

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SUBMERSION TRANSDUCER WITH ADJUSTABLE FOCUS von PEISLEY, David, STEARNS, Richard, STEARNS, Daniel, WHALEN, William, FATHOLLAHI, Bahram

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Measurement of the temporal progression of scour in a pool-riffle sequence in a gravel bed stream using an electronic scour monitor von DeVries, Paul, Burges, Stephen J., Daigneau, Julie, Stearns, Daniel

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SYSTEMS AND METHODS FOR SAMPLE PROCESSING OR ANALYSIS von PEISLEY, David, STEARNS, Daniel G, WHALEN, William, FATHOLLAHI, Bahram

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SYSTEMS AND METHODS FOR SAMPLE PROCESSING OR ANALYSIS von PEISLEY, David, STEARNS, Daniel G, WHALEN, William, FATHOLLAHI, Bahram

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Ion-assisted sputter deposition of molybdenum-silicon multilayers von Vernon, Stephen P., Stearns, Daniel G., Rosen, Robert S.

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SYSTEMS AND METHODS FOR ALIGNMENT OF AN ACOUSTIC BEAM IN A MICROFLUIDIC DEVICE von PEISLEY, David, STEARNS, Daniel G, STEARNS, Richard, WHALEN, William, FATHOLLAHI, Bahram

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An Experience With Design by Contract von Tantivongsathaporn, J., Stearns, D.

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Optimization of growth conditions of vapor deposited Mo/Si multilayers von BETH STERNS, M, CHUNG-HEE CHANG, STEARNS, D. G

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Bee smoker von STEARNS DANIEL

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MANIPULATION OF OBJECTS IN MICROFLUIDIC DEVICES USING EXTERNAL ELECTRODES von STEARNS, Daniel G, CHEN, I-Jane, RICE, Bradley W, WHEELER, Tobias D, TRAN, Danh, MOLHO, Joshua I

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Devices and methods for high-throughput single cell and biomolecule analysis and retrieval in a microfluidic chip von Fathollahi, Bahram, Stearns, Daniel G, Whalen, William

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