Treffer 1 - 4 von 4 für Suche 'SOLAB, ASHISH', Suchdauer: 0,26s Treffer weiter einschränken
  1. 1
    Accurate determination of radio frequency power through digital inversion of sensor effects

    Accurate determination of radio frequency power through digital inversion of sensor effects von SOLAB, ASHISH, LEESER KARL FREDERICK

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  2. 2
    Method and apparatus for radio frequency mesh design in ESC for reducing film asymmetry

    Method and apparatus for radio frequency mesh design in ESC for reducing film asymmetry von MAMUNURU, MEENAKSHI, SOLAB, ASHISH, FRENCH DAVID, VAHIDI MUHAMMAD, TOPPING STEPHEN, YUKINORI, SAKIYAMA, THOMAS TIMOTHY SCOTT, SUBRAMONIAM, PRAMOD, CHANDRASEKHARAN, RAMESH, BREILING PATRICK G, BELOSTOTSKIY SERGEY GEORGIEVICH, BAKER NOAH ELLIOT

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  3. 3
    Temperature control of multi-segment susceptor

    Temperature control of multi-segment susceptor von SOLAB, ASHISH, ROBERTS MICHAEL PHILIP, CHANDRASEKHARAN, RAMESH, AGARWAL PULKIT, BINGHAM, AARON, LAVOIE ADRIEN, KUMAR RAVI

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  4. 4
    Adjustable and non-adjustable heat shield for influencing temperature profile of substrate support

    Adjustable and non-adjustable heat shield for influencing temperature profile of substrate support von SOLAB, ASHISH, THOMAS TIMOTHY SCOTT, LEESER KARL FREDERICK, BAILEY CURTIS W, CHEN XINYI, GOMM, TROY, SINGH MUKESH DAMI

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