Surface-micromachined gear trains driven by an on-chip electrostatic microengine von Sniegowski, J.J., Garcia, E.J.

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Abstract P005: SLC38A5 characterization and its tumor promoting role in pancreatic ductal adenocarcinoma von Sniegowski, Tyler J., Ganapathy, Vadivel, Bhutia, Yangzom

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Characteristics of polysilicon resonant microbeams von Zook, J.D., Burns, D.W., Guckel, H., Sniegowski, J.J., Engelstad, R.L., Feng, Z.

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Surface micromachined microengine von Garcia, Ernest J., Sniegowski, Jeffry J.

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Design of compliant mechanisms: Applications to MEMS von Kota, S, Joo, J, Li, Z, Rodgers, S M, Sniegowski, J

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Failure modes in surface micromachined microelectromechanical actuation systems von Miller, S.L, Rodgers, M.S, La Vigne, G, Sniegowski, J.J, Clews, P, Tanner, D.M, Peterson, K.A

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Maturation efficiency, trypsin sensitivity, and optical properties of Arg96, Glu222, and Gly67 variants of green fluorescent protein von Sniegowski, Jennifer A., Phail, Marlene E., Wachter, Rebekka M.

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IC-COMPATIBLE POLYSILICON SURFACE MICROMACHINING von Sniegowski, J. J, de Boer, M. P

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Radiation effects on surface micromachined comb drives and microengines von Schanwald, L.P., Schwank, J.R., Sniegowsi, J.J., Walsh, D.S., Smith, N.F., Peterson, K.A., Shaneyfelt, M.R., Winokur, P.S., Smith, J.H., Doyle, B.L.

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Electrical linewidth test structures fabricated in monocrystalline films for reference-material applications von Cresswell, M.W., Allen, R.A., Guthrie, W.F., Sniegowski, J.J., Ghoshtagore, R.N., Linholm, L.W.

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Recent developments in electrical linewidth and overlay metrology for integrated circuit fabrication processes von CRESSWELL, M. W, SNIEGOWSKI, J. J, GHOSHTAGORE, R. N, ALLEN, R. A, GUTHRIE, W. F, GURNELL, A. W, LINHOLM, L. W, DIXSON, R. G, TEAGUE, E. C

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IC-compatible polysilicon surface micromachining von Sniegowski, J J, de Boer, M P

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The application of fine-grained, tensile polysilicon to mechanicaly resonant transducers von Guckel, H., Sniegowski, J.J., Christenson, T.R., Raissi, F.

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Embedded micromechanical devices for the monolithic integration of MEMS with CMOS von Smith, J.H., Montague, S., Sniegowski, J.J., Murray, J.R., McWhorter, P.J.

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Thin Teflon-like films for eliminating adhesion in released polysilicon microstructures: Technical Digest for Transducers '97 von SMITH, B. K, SNIEGOWSKI, J. J, LAVIGNE, G, BROWN, C

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Multi-layer enhancement to polysilicon surface-micromachining technology von Sniegowski, J.J., Rodgers, M.S.

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Fabrication of micromechanical devices from polysilicon films with smooth surfaces von Guckel, H., Sniegowski, J.J., Christenson, T.R., Mohney, S., Kelly, T.F.

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Failure modes in surface micromachined microelectromechanical actuators von Miller, S.L., Rodgers, M.S., LaVigne, G., Sniegowski, J.J., Clews, P., Tanner, D.M., Peterson, K.A.

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Thin Teflon-like films for eliminating adhesion in released polysilicon microstructures von Smith, Bradley K., Sniegowski, Jeffry J., LaVigne, Glenn, Brown, Craig

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Method for simultaneous modification of multiple semiconductor device features von Zortman, William A, Larson, Kurt W, Shul, Randy J, Sniegowski, Jeffry J

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