The Importance of Taking into Account the Heterogeneous Recombination of Atoms when Studying the Kinetics of Copper Etching in Chlorine Plasma von Sitanov, D. V., Pivovarenok, S. A., Murin, D. B.

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Heterogeneous recombination of atoms on aluminum samples in chlorine plasma von Sitanov, D. V., Pivovarenok, S. A.

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Kinetics of Atomic Recombination on Silicon Samples in Chlorine Plasma von Sitanov, D. V., Pivovarenok, S. A.

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Effect of a Mixture’s Composition on the Electrophysical Parameters and Emission Spectra of Hydrogen Chloride Plasma with Chlorine and Helium von Pivovarenok, S. A., Murin, D. B., Sitanov, D. V.

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A study of heterogeneous recombination of chlorine atoms on aluminum and copper surfaces in glow discharge plasma von Sitanov, D. V., Pivovarenok, S. A.

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Visualization of Defects on the Semiconductor Surface Using a Dielectric Barrier Discharge von Sitanov, D. V., Pivovarenok, S. A.

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General features of interaction between copper and chlorine-containing gases von Dunaev, A. V., Sitanov, D. V., Murin, D. B.

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A comparative study of plasma parameters and gas phase compositions in Cl2 and HCl direct current glow discharges von EFREMOV, A. M, SVETTSOV, V. I, SITANOV, D. V, BALASHOV, D. I

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A comparative study of plasma parameters and gas phase compositions in Cl 2 and HCl direct current glow discharges von Efremov, A.M., Svettsov, V.I., Sitanov, D.V., Balashov, D.I.

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Determination of the probability of the heterogeneous recombination of chlorine atoms on the construction materials of plasma chemical reactors von Iventichev, M. Yu, Sitanov, D. V., Svettsov, V. I.

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The formation and decay of atoms in a pulsed low-frequency glow discharge in a chlorine-hydrogen mixture von Iventichev, M. Yu, Sitanov, D. V., Svettsov, V. I.

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The parameters of plasma and the kinetics of generation and loss of active particles under conditions of discharge in chlorine von Efremov, A. M., Svettsov, V. I., Sitanov, D. V.

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The parameters of plasma and the kinetics of generation and loss of active particles in chlorine-nitrogen mixtures von Efremov, A. M., Sitanov, D. V., Svettsov, V. I.

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Spectral measurements of the probability of recombination of active particles of plasma on solid surfaces in chlorine and its mixtures with inert and molecular gases von Sitanov, D. V., Svettsov, V. I., Efremov, A. M.

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A study of the decay of atoms in chlorine plasma on aluminum films von Iventichev, M. Yu, Boikova, I. S., Sitanov, D. V., Svettsov, V. I.

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Determination of the Rate Coefficient for the Heterogeneous Recombination of Chlorine Atoms in a Plasma Reactor by the Relaxation Technique von Kirillov, Yu. V., Sitanov, D. V.

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Evaluating the Wall-Recombination Constant of Cl Atoms in Cl2-Ar Plasmas of Different Ar Percentage von Kirillov, Yu. V., Sitanov, D. V.

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Use of optical emission spectroscopy for determining the number concentration of chlorine atoms in a chlorine-oxygen plasma von Skorodumov, A. E., Sitanov, D. V., Svettsov, V. I.

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Activation of natural aluminosilicates in the argon glow-discharge positive column von Razgovorov, P. B., Sitanov, D. V., Prokof’ev, V. Yu, Shchipalov, Yu. K.

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The role of ions and UV radiation in gallium arsenide etching process von Kirillov, Yu. V., Sitanov, D. V., Svettsov, V. I.

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