A Novel Nanoinjection Lithography (NInL) Technology and Its Application for 16-nm Node Device Fabrication von CHEN, Hou-Yu, CHEN, Chun-Chi, HSUEH, Fu-Kuo, LIU, Jan-Tsai, SHY, Shyi-Long, WU, Cheng-San, CHIEN, Chao-Hsin, CHENMING HU, HUANG, Chien-Chao, YANG, Fu-Liang

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Low Temperature Metal Induced Crystallization of Amorphous Silicon by Nano-Gold-Particles von Yang, Ru-Yuan, Weng, Min-Hang, Liang, Chihng-Tsung, Su, Yan-Kuin, Shy, Shyi-Long

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0.35 μm pattern fabrication using quartz-etch attenuate phase-shifting mask in an I-line stepper with a 0.50 NA and a 0.60 sigma von Loong, Wen-an, Shy, Shyi-long, Lin, Yung-chi

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Cross shaped pattern on chrome mask for 0.5 μm contact hole fabrication von Loong, Wen-An, Shy, Shyi-Long, Guo, Guey-Chi, Yang, Ming-Tzong, Su, Shyang

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Fabrication of quantum dots using in-situ etching and regrowth during MBE growth von Der-Cherng Liu, Chien-Ping Lee, Shyi-Long Shy

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Wafer stepping exposure apparatus and method for wafer stepping and exposure von SHY, SHYI LONG

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Preparation of Nanoparticle Using Self-organized Anodic Alumina and Electroplating Techniques von Ting, Yung-Chiang, Shy, Shyi-Long

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Wafer stepping exposure apparatus and method for wafer stepping and exposure von SHY, SHYI-LONG

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Micro/nano-meter optical grating manufacturing method von TING, YUNGIANG, SHY, SHYI-LONG

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Producing Oxide Coating on Aluminum for Surface Modification von Ting, Yung-Chiang, Shy, Shyi-Long, Hsu, Pe-Ming, Chen, Hui-Li

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Method for fabricating patterned layer von HUANG CHIENAO, YANG FU-LIANG, CHEN CHUNI, SHY SHYI-LONG, WU CHENG-SAN

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Electron beam imaging method using conducting polyaniline material von SHY, SHYI-LONG

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METHOD FOR FABRICATING PATTERNED LAYER von HUANG CHIENAO, YANG FU-LIANG, CHEN CHUNI, SHY SHYI-LONG, WU CHENG-SAN

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16nm functional 0.039µm2 6T-SRAM cell with nano injection lithography, nanowire channel, and full TiN gate von Hou-Yu Chen, Chun-Chi Chen, Fu-Kuo Hsueh, Jan-Tsai Liu, Chih-Yen Shen, Chiung-Chih Hsu, Shyi-Long Shy, Bih-Tiao Lin, Hsi-Ta Chuang, Cheng-San Wu, Chenming Hu, Chien-Chao Huang, Fu-Liang Yang

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LITHOGRAPHIC MACHINE PLATFORM AND APPLICATIONS THEREOF von HUANG CHIENAO, YANG FU-LIANG, CHEN CHUNI, SHY SHYI-LONG, WU CHENG-SAN

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Chemical shrink process applied in the method of manufacturing micro-nanometer circuit von TING, YUNGIANG, SHY, SHYI-LONG

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Music chair von TING, YUNGIANG, JHANG, TSUNG-WEN, HSU, PE-MING, SHY, SHYI-LONG, LEE, MINGUN

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Investigation of effects attributed to spherical carbon nanomaterials in proteomic matrix-assisted laser desorption ionization-time of flight mass spectrometer von Hsiang-Sheng Wen, Lai-Fu Tsai, Chien-Wei Liu, Yu-Chang Tyan, Shyi-Long Shy, Bau-Tong Dai, Pao-Chi Liao

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Proximity effect correction method for mask production von WU, H. J, SHY, SHYI-LONG

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Music bed von TING, YUNGIANG, HSU, PE-MING, SHY, SHYI-LONG, LI, PEI-RONG, LEE, MINGUN

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