Plasma etching of wide bandgap and ultrawide bandgap semiconductors von Pearton, Stephen J., Douglas, Erica A., Shul, Randy J., Ren, Fan

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Plasma etching of wide bandgap and ultrawide bandgap semiconductors von Pearton, Stephen J., Douglas, Erica A., Shul, Randy J., Ren, Fan

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Low-pressure inductively coupled plasma etching of benzocyclobutene with SF6/O2 plasma chemistry von Douglas, Erica A., Stevens, Jeffrey, Fishgrab, Kira, Ford, Christine, Shul, Randy J., Pearton, Stephen J.

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Electron impact ionization cross sections of SiF2 von SHUL, R. J, HAYES, T. R, WETZEL, R. C, BAIOCCHI, F. A, FREUND, R. S

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Cross-section measurements for electron-impact ionization of atoms von Freund, RS, Wetzel, RC, Shul, RJ, Hayes, TR

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Electron-impact ionization cross sections of the SiF3 free radical von HAYES, T. R, SHUL, R. J, BAIOCCHI, F. A, WETZEL, R. C, FREUND, R. S

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Implantation and Dry Etching of Group-III-Nitride Semiconductors von Zolper, J.C., Shul, R.J.

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Dry etching of GaN and related materials: comparison of techniques von Jewon Lee, Hyun Cho, Hays, D.C., Abernathy, C.R., Pearton, S.J., Shul, R.J., Vawter, G.A., Han, J.

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Simulation of npn and pnp AlGaN/GaN heterojunction bipolar transistors performances: limiting factors and optimum design von Monier, C., Fan Ren, Jung Han, Ping-Chih Chang, Shul, R.J., Kyu-Pil Lee, Anping Zhang, Baca, A.G., Pearton, S.

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PLASMA-BASED METHOD FOR DELAYERING OF CIRCUITS von Rye, Michael J, Mudrick, John, Sniegowski, Jeffry Joseph, Greth, Karl Douglas, Salazar, Gregory Paul, Friedman, Caitlin Rochford, Nakakura, Craig Y, Shul, Randy J

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Plasma-based method for delayering of circuits von Rye, Michael J, Mudrick, John, Sniegowski, Jeffry Joseph, Greth, Karl Douglas, Salazar, Gregory Paul, Friedman, Caitlin Rochford, Nakakura, Craig Y, Shul, Randy J

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Systems and methods for interferometric end point detection for a focused ion beam fabrication tool von Ball, Steven Norris, Salazar, Gregory Paul, Shul, Randy J, Phillips, Brian Scott

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Method for simultaneous modification of multiple semiconductor device features von Zortman, William A, Larson, Kurt W, Shul, Randy J, Sniegowski, Jeffry J

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Ultra-low-power, long-wavelength photoreceivers for massively-parallel optical data links von Lovejoy, M.L., Patrizi, G.A., Enquist, P.M., Carson, R.F., Craft, D.C., Shul, R.J.

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Lateral vias for connections to buried microconductors and methods thereof von Grubbs, Robert K, Fishgrab, Kira L, Silverman, Scott, Henry, Michael David, Greth, Karl Douglas, Hodges, V. Carter, Shul, Randy J, Adams, David P, Goeke, Ronald S, Stevens, Jeffrey

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LATERAL VIAS FOR CONNECTIONS TO BURIED MICROCONDUCTORS AND METHODS THEREOF von Grubbs, Robert K, Fishgrab, Kira L, Silverman, Scott, Henry, Michael David, Greth, Karl Douglas, Hodges, V. Carter, Shul, Randy J, Adams, David P, Goeke, Ronald S, Stevens, Jeffrey

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Lateral vias for connections to buried microconductors von Grubbs, Robert K, Fishgrab, Kira L, Henry, Michael David, Greth, Karl Douglas, Hodges, V. Carter, Shul, Randy J, Adams, David P, Goeke, Ronald S, Stevens, Jeffrey

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Die singulation method and package formed thereby von Anderson, Robert C, Shul, Randy J, Clews, Peggy J, Baker, Michael S, De Boer, Maarten P

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Measurements of electron-impact-ionization cross sections of N2, CO, CO2, CS, S2, CS2, and metastable N2 von Freund, RS, Wetzel, RC, Shul, RJ

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Die singulation method and package formed thereby von DE BOER MAARTEN P, SHUL RANDY J, ANDERSON ROBERT C, CLEWS PEGGY J, BAKER MICHAEL S

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