Thermodynamics and kinetics of silicon under conditions of strong electronic excitation von Shokeen, Lalit, Schelling, Patrick K.

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Role of electronic-excitation effects in the melting and ablation of laser-excited silicon von Shokeen, Lalit, Schelling, Patrick K.

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Molecular-dynamics calculation of the vacancy heat of transport von Schelling, Patrick K., Ernotte, Jacques, Shokeen, Lalit, Woods Halley, J., Tucker, William C.

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Hard mask etch and dielectric etch aware overlap for via and metal layers von Ning Guo Xiang, Ackmann Paul W, Lim Chin Teong, Shokeen Lalit, Hu Xiang, Ren Yuping, Power David

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Method and apparatus of etch modeling for semiconductor devices von HU, XIANG, REN, YUPING, ACKMANN, PAUL W, NING, GUO XIANG, POWER, DAVID, LIM, CHIN TEONG, SHOKEEN, LALIT

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Hard mask etch and dielectric etch aware overlap for via and metal layers von HU, XIANG, REN, YUPING, ACKMANN, PAUL W, NING, GUO XIANG, POWER, DAVID, LIM, CHIN TEONG, SHOKEEN, LALIT

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Hard Mask Etch And Dielectric Etch Aware Overlap For Via And Metal Layers von PAUL W. ACKMANN, YUPING REN, CHIN TEONG LIM, DAVID POWER, GUO XIANG NING, XIANG HU, LALIT SHOKEEN

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