Basic characteristics of beam position drift and field stitching error caused by electron beam column charging von MORITA, H, KATO, J, SHIMAZU, N

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Application of mark detection using the vibration method to an electron beam exposure system von TAKAMOTO, K, SHIMAZU, N

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A 100 kV Electron Gun for the X-Ray Mask Writer, EB-X2 von Saito, Kenichi, Kato, Junichi, Nobuo Shimazu, Nobuo Shimazu, Akira Shimizu, Akira Shimizu

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A beam drift reduction device for the X-ray mask E-beam writer, EB-X2 von KATO, J, SAITO, K, MORITA, H, SHIMAZU, N

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Present Status of Exposure Tool Development for Low Energy Electron-beam Proximity Projection Lithography von Endo, Akihiro, Higuchi, Akira, Kasahara, Haruo, Nozue, Hiroshi, Shimazu, Nobuo, Fukui, Toyoji, Yasumitsu, Naoki, Miyatake, Tsutomu, Anazawa, Norimichi

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Proximity effect correction for X-ray mask fabrication von KURIYAMA, Y, MORIYA, S, UCHIYAMA, S, SHIMAZU, N

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An approach to a high-throughput e-beam writer with a single-gun multiple-path system von SHIMAZU, N, SAITO, K, FUJINAMI, M

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Changes in precision engineering. LSI industry von SHIMAZU, Nobuo

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Development of Low Energy Electron Beam Proximity Projection Lithography von SHIMAZU, Nobuo

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TRANSFER APPARATUS von SHIMAZU NOBUO

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MANUFACTURING METHOD OF ELECTRONIC BEAM EXPOSURE MASK von SHIMAZU NOBUO

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A Measuring Method for Chucking and Release Time in an Electrostatic Chuck von KUNIOKA, Tatsuya, SHIMAZU, Nobuo

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SYSTEM AND METHOD FOR ELECTRON BEAM PROXIMITY EXPOSURE von SHIMAZU NOBUO

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An Approach to a High-Throughput E-Beam Writer with a Single-Gun Multiple-Path System von Shimazu, Nobuo, Saito, Kenichi, Minpei Fujinami, Minpei Fujinami

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Electron beam proximity exposure apparatus and mask unit therefor von UTSUMI TAKAO, SHIMAZU NOBUO

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Electron beam proximity exposure apparatus and mask unit therefor von Shimazu, Nobuo, Utsumi, Takao

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High Speed Electron Beam Lithography von SHIMAZU, Nobuo, TSUYUZAKI, Haruo

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ELECTRON BEAM EXPOSING APPARATUS, ELECTRON BEAM EXPOSING METHOD AND ELECTRON BEAM EXPOSING SYSTEM von KAWAMURA YUKISATO, SHIMAZU NOBUO

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Electron beam proximity exposure apparatus and method von Shimazu, Nobuo, Utsumi, Takao

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Electron beam proximity exposure apparatus and method von UTSUMI TAKAO, SHIMAZU NOBUO

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