Effects of electrostatic forces generated by the driving signal on capacitive sensing devices von Bao, Minhang, Yang, Heng, Yin, Hao, Shen, Shaoqun

Volltext

A novel bulk micromachined gyroscope based on a rectangular beam-mass structure von Yang, Heng, Bao, Minhang, Yin, Hao, Shen, Shaoqun

Volltext

A micromachined piezoresistive angular rate sensor with a composite beam structure von Li, Xinxin, Bao, Minhang, Yang, Heng, Shen, Shaoqun, Lu, Deren

Volltext

Two-dimensional excitation operation mode and phase detection scheme for vibratory gyroscopes von Yang, Heng, Bao, Minhang, Yin, Hao, Shen, Shaoqun

Volltext

Over-range capacity of a piezoresistive microaccelerometer von Chen, Hong, Shen, Shaoqun, Bao, Minhang

Volltext

Maskless etching of three-dimensional silicon structures in KOH von Li, Xinxin, Bao, Minhang, Shen, Shaoqun

Volltext

Study on linearization of silicon capacitive pressure sensors von Li, Xinxin, Bao, Minhang, Shen, Shaoqun

Volltext

A novel technique for measuring etch rate distribution of Si von Yang, Heng, Bao, Minhang, Shen, Shaoqun, Li, Xinxin, Zhang, Dacheng, Wu, Guoyin

Volltext

composite beam structure formed by masked-maskless etch of silicon von Li, Xinxin, Yang, Heng, Bao, Minhang, Shen, Shaoqun, Wang, Weiyuan

Volltext

A piezoresistive accelerometer with a novel vertical beam structure von Chen, Hong, Bao, Minhang, Zhu, Haijun, Shen, Shaoqun

Volltext

langle100rangle composite beam structure formed by masked-maskless etch of silicon von Li, Xinxin, Yang, Heng, Bao, Minhang, Shen, Shaoqun, Wang, Weiyuan

Volltext

ULTRA-THIN FULL-FRAME HIGH-TEMPERATURE-RESISTANT SEMICONDUCTOR STRAIN GAUGE AND PREPARATION METHOD THEREFOR von LIANG, Minru, LI, Shucheng, SHEN, Shaoqun, LI, Haiquan

Volltext bestellen

DSOI (Double Silicon Oxide Insulation) strain gage and manufacturing method thereof von LUO XIAOYONG, SHEN SHAOQUN, LIANG DONGHAN

Volltext bestellen

DSOI strainometer von LUO XIAOYONG, SHEN SHAOQUN, LIANG DONGHAN

Volltext bestellen

Monolithic silicon based SOI high-temperature low-drift pressure sensor von SHAOQUN SHEN

Volltext bestellen

A novel micromachining technology for multilevel structures of silicon von Bao, Minhang, Li, Xinxin, Shen, Shaoqun, Chen, Hong

Volltext

DSOI micropressure sensor von SHEN SHAOQUN, HAN SHUTING

Volltext bestellen

100 composite beam structure formed by masked-maskless etch of silicon von Li, Xinxin, Yang, Heng, Bao, Minhang, Shen, Shaoqun, Wang, Weiyuan

Volltext

Low-drifting DSOI pressure sensor von SHEN SHAOQUN, HAN SHUTING

Volltext bestellen

Ultra-thin full-frame high-temperature-resistant semiconductor strain gauge and preparation method thereof von SHEN SHAOQUN, LIANG MINRU, LI SHUCHENG, LI HAIQUAN

Volltext bestellen