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Infinitely high selective inductively coupled plasma etching of an indium tin oxide binary mask structure for extreme ultraviolet lithography von Park, Y. R., Ahn, J. H., Kim, J. S., Kwon, B. S., Lee, N.-E., Kang, H. Y., Hwangbo, C. K., Ahn, Jinho, Seo, Hwan Seok

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Effects of mask absorber structures on the extreme ultraviolet lithography von Seo, Hwan-Seok, Lee, Dong-Gun, Kim, Hoon, Huh, Sungmin, Ahn, Byung-Sup, Han, Hakseung, Kim, Dongwan, Kim, Seong-Sue, Cho, Han-Ku, Gullikson, Eric M.

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GIS를 이용한 산림 생물의 공간적·환경적 특성 분석 - 백두대간(경북·충북)을 대상으로 von 박정묵, 서환석, 이정수, Park, Jeong-Mook, Seo, Hwan-Seok, Lee, Jung-Soo

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Pipe fitting machining and shaping mechanism von SEO SEOK-HWAN, HUANG QIUFENG

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Positioning device and positioning method of unmanned transfer trolley von SEO SEOK-HWAN, HUANG QIUFENG

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PHOTOMASKS, METHODS OF MANUFACTURING PHOTOMASKS, AND METHODS OF MANUFACTURING SEMICONDUCTOR DEVICE USING PHOTOMASKS von LEE, Myoung Soo, LEE, Byung Hoon, SEO, Hwan Seok

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Reflective photomask blanks and reflective photomasks von Seo Hwan-seok, Lee Su-young

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Phase shift mask for extreme ultraviolet lithography von KIM, SEONG SUE, SEO, HWAN SEOK, ROMAN CHALYKH, LEE, TAE HOON

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Mask blank and phase shift mask using same von Seo, Hwan Seok, Jang, Il Yong, Lee, Hye Kyoung, Kim, Byung Gook

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MASK BLANK PHASE SHIFT MASK AND METHOD OF FABRICATING THE SAME von KIM, BYUNG GOOK, JANG, IL YONG, SEO, HWAN SEOK, LEE, HYE KYOUNG

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Phase shift mask for extreme ultraviolet lithography von SEO, HWAN-SEOK, KIM, SEONG-SUE, JEONG, CHANG-YOUNG

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REFLECTIVE PHOTOMASK BLANK AND REFLECTIVE PHOTOMASK von SEO, HWAN SEOK, LEE, SU YOUNG

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Phase shift masks for extreme ultraviolet lithography von KIM, DONG-WAN, SEO, HWAN-SEOK, KIM, SEONG-SUE

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MASK BLANK AND PHASE SHIFT MASK USING SAME von LEE Hye Kyoung, JANG Il Yong, KIM Byung Gook, SEO Hwan Seok

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REFLECTIVE MASK FOR EXTREME ULTRA VIOLET(EUV) LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING THE SAME von KIM, IN SUNG, KIM, SEONG SUE, SEO, HWAN SEOK, KIM, TAE GEUN

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반도체장치의장벽금속막형성방법 von SEO, HWAN SEOK

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반도체장치의장벽금속막형성방법 von SEO, HWAN SEOK

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