Approach to control deposition of ultra thin films from metal organic precursors: Ru deposition von Igumenov, Igor K., Semyannikov, Pyotr P., Trubin, Sergei V., Morozova, Natalia B., Gelfond, Nikolay V., Mischenko, Alexander V., Norman, John A.

Volltext

Novel N-Containing Precursors of Nickel(II) for Film Deposition by MOCVD von Zherikova, Kseniya V., Morozova, Natalia B., Kil'metiev, Aleksandr S., Zelenina, Ludmila N., Semyannikov, Pyotr P., Gelfond, Nikolay V., Chusova, Tamara P., Igumenov, Igor K.

Volltext

Volatile caesium-containing compounds of Cs[Y(β-diketonato)4] type: Thermal behaviour in condensed and gas phases von Vikulova, Evgeniia S., Zherikova, Kseniya V., Zelenina, Ludmila N., Trubin, Sergey V., Sysoev, Sergey V., Semyannikov, Pyotr P., Asanov, Igor P., Morozova, Natalia B., Igumenov, Igor K.

Volltext

Synthesis, crystal structure and thermal behavior of dimethylgold(III) derivatives of salicylaldimine Schiff bases – Novel precursors for gold MOCVD applications von Bessonov, Aleksandr A., Morozova, Natalia B., Gelfond, Nikolay V., Semyannikov, Pyotr P., Baidina, Iraida A., Trubin, Sergey V., Shevtsov, Yuriy V., Igumenov, Igor K.

Volltext

Pulsed MO CVD Processes of MgO Layer Deposition from Mg(thd) 2 von Kuchumov, Boris M., Shevtsov, Yuriy V., Semyannikov, Pyotr P., Filatov, Egor S., Igumenov, Igor K.

Volltext

Volatile hafnium(IV) compounds with beta-diketonate and cyclopentadienyl derivatives von Morozova, Natalia B., Zherikova, Ksenia V., Baidina, Iraida A., Sysoev, Sergei V., Semyannikov, Pyotr P., Yakovkina, Lyubov’ V., Smirnova, Tamara P., Gelfond, Nikolay V., Igumenov, Igor K., Carta, Giovanni, Rossetto, Gilberto

Volltext

Preparation of Iridium Thin Film by Pulse CVD from Ir(acac)(CO) 2 von Semyannikov, Pyotr P., Morozova, Natalia B., Zherikova, Kseniya V., Trubin, Sergey V., Igumenov, Igor K., Gelfond, Nikolay V.

Volltext

In-Situ Investigation of the Processes of Precursor Adsorption by Means of Ellipsometry and Mass Spectrometry von Igumenov, Igor K., Prozorov, Pavel, Semyannikov, Pyotr P., Zhukova, Irina N.

Volltext

Deposition of Ir Nanostructured Thin Films by Pulse CVD von Gelfond, Nikolay V., Semyannikov, Pyotr P., Trubin, Sergey V., Morozova, Natalia B., Igumenov, Igor K.

Volltext

Low-temperature MOCVD of Epitaxial CaF 2 and SrF 2 Films von Makarevich, Artyom M., Shсhukin, Alexandr, Markelov, Anton, Samoilenkov, Sergej, Semyannikov, Pyotr P., Kuzmina, Natalia P.

Volltext

Pulse CVD Deposition of Ru Films from Ru(II) ή3-Allylic Complex von Trubin, Sergey V., Morozova, Natalia B., Semyannikov, Pyotr P., Bessonov, Alexandr, Gelfond, Nikolay V., Igumenov, Igor K.

Volltext

Thermal Properties of Some Volatile Titanium (IV) Precursors von Filatov, Egor S., Nizard, Harry, Semyannikov, Pyotr P., Sysoev, Sergey V., Trubin, Sergey V., Morozova, Natalia B., Zherikova, Kseniya V., Gelfond, Nikolay V.

Volltext

In Situ Investigation of the Processes of Precursor Adsorption by Means of Ellipsometry and Mass Spectrometry von Igumenov, Igor, Prozorov, Pavel, Semyannikov, Pyotr P., Zhukova, Irina N.

Volltext

Volatile hafnium(IV) compounds with beta-diketonate and cyclopentadienyl derivatives von MOROZOVA, Natalia B, ZHERIKOVA, Ksenia V, ROSSETTO, Gilberto, BAIDINA, Iraida A, SYSOEV, Sergei V, SEMYANNIKOV, Pyotr P, YAKOVKINA, Lyubov V, SMIRNOVA, Tamara P, GELFOND, Nikolay V, IGUMENOV, Igor K, CARTA, Giovanni

Volltext

Approach to control deposition of ultra thin films from metal organic precursors : Ru deposition von IGUMENOV, Igor K, SEMYANNIKOV, Pyotr P, TRUBIN, Sergei V, MOROZOVA, Natalia B, GELFOND, Nikolay V, MISCHENKO, Alexander V, NORMAN, John A

Volltext

Investigation of Precursor Adsorption on Silicon Surface by Means of Molecular Dynamics von Zhukova, Irina N., Golovnev, Igor F., Igumenov, Igor K., Semyannikov, Pyotr P., Filatov, Egor S.

Volltext

Deposition of Ir Nanostructured Thin Films by Pulse CVD von Gelfond, Nikolay V., Semyannikov, Pyotr P., Trubin, Sergey V., Morozova, Natalia B., Igumenov, Igor

Volltext

Pulsed MOCVD Processes of MgO Layer Deposition from Mg(thd) 2 von Kuchumov, Boris M., Shevtsov, Yuriy V., Semyannikov, Pyotr P., Filatov, Egor S., Igumenov, Igor K.

Volltext

Low-Temperature MOCVD of Epitaxial CaF 2 and SrF 2 Films von Makarevich, Artyom M., Shсhukin, Alexandr, Markelov, Anton, Samoilenkov, Sergej, Semyannikov, Pyotr P., Kuzmina, Natalia P.

Volltext

Preparation of Iridium Thin Film by Pulse CVD from Ir(acac)(CO) 2 von Semyannikov, Pyotr P., Morozova, Natalia B., Zherikova, Kseniya V., Trubin, Sergey V., Igumenov, Igor K., Gelfond, Nikolay V.

Volltext