Nonlinear Dynamics of Spring Softening and Hardening in Folded-MEMS Comb Drive Resonators von Elshurafa, A. M., Khirallah, K., Tawfik, H. H., Emira, A., Abdel Aziz, Ahmed K. S., Sedky, S. M.

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Micromachined On-Chip Dielectric Resonator Antenna Operating at 60 GHz von Sallam, Mai O., Serry, Mohamed, Sedky, Sherif, Shamim, Atif, De Raedt, Walter, Vandenbosch, Guy A. E., Soliman, Ezzeldin A.

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Spatial beam splitting for fully integrated MEMSinterferometer von Khirallah, Kareem, Ramsis, Inas, Serry, Mohamed, Swillam, Mohamed A., Sedky, Sherif

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Design and simulation of a high-performance Z-axis SOI-MEMS accelerometer von Sharaf, Abdelhameed, Sedky, Sherif

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SiGe: An attractive material for post-CMOS processing of MEMS von Sedky, Sherif

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Silicon Germanium as a Novel Mask for Silicon Deep Reactive Ion Etching von Serry, Mohamed, Rubin, Andrew, Ibrahem, Mohamed, Sedky, Sherif

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All-pMOS 50-V Charge Pumps Using Low-Voltage Capacitors von Emira, A., AbdelGhany, M., Elsayed, M., Elshurafa, A. M., Sedky, S., Salama, K. N.

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Effect of Localized Laser Treatment on Fatigue Performance of Single-Crystal Silicon Microstructures

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Experimental determination of the maximum post-process annealing temperature for standard CMOS wafers von Sedky, S., Witvrouw, A., Bender, H., Baert, K.

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SiGe MEMS at processing temperatures below 250°C von El-Rifai, Joumana, Sedky, Sherif, Van Hoof, Rita, Severi, Simone, Lin, Dennis, Sangameswaran, Sandeep, Puers, Robert, Van Hoof, Chris, Witvrouw, Ann

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Surface Roughness Modification of Free Standing Single Crystal Silicon Microstructures Using KrF Excimer Laser Treatment for Mechanical Performance Improvement von Mitwally, Mohamed Elwi, Tsuchiya, Toshiyuki, Tabata, Osamu, Sedky, Sherif

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Characterization and optimization of infrared poly SiGe bolometers von Sedky, S., Fiorini, P., Baert, K., Hermans, L., Mertens, R.

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SiGe MEMS at processing temperatures below 250 degree C von El-Rifai, Joumana, Sedky, Sherif, Van Hoof, Rita, Severi, Simone, Lin, Dennis, Sangameswaran, Sandeep, Puers, Robert, Van Hoof, Chris, Witvrouw, Ann

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Poly SiGe, a promising material for MEMS monolithic integration with the driving electronics von Sedky, Sherif, Witvrouw, Ann, Baert, Kris

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Effect of Pulsed Laser on the Structure and Morphology of Alumina-Zirconia Coatings von Omar, Hala, Ibrahim, Ahmed, Salem, Hanadi, Sedky, Sherif

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Pulsed Laser Deposition of Bismuth Telluride Thin Films for Microelectromechanical Systems Thermoelectric Energy Harvesters von Abdel Aziz, Ahmed, Elsayed, Mohannad, Abu Bakr, Hassan, El-Rifai, Joumana, Van der Donck, Tom, Celis, Jean-Pierre, Leonov, Vladimir, Fiorini, Paolo, Sedky, Sherif

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Optimal conditions for micromachining Si1-xGex at 210 °C von SEDKY, Sherif, BAYOUMY, Ahmed, ALAA, Ahmed, NAGY, Ahmed, WITVROUW, Ann

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Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment von Mitwally, Mohamed E., Tsuchiya, Toshiyuki, Tabata, Osamu, Sedky, Sherif

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IR bolometers made of polycrystalline silicon germanium von Sedky, Sherif, Fiorini, Paolo, Caymax, Matty, Verbist, Agnes, Baert, Chris

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Pulsed-laser annealing, a low-thermal-budget technique for eliminating stress gradient in poly-SiGe MEMS structures von Sedky, S., Howe, R.T., Tsu-Jae King

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