Optical measurement of the roughness of sinusoidal surfaces von Vorburger, T.V., Gilsinn, D.E., Scire, F.E., McLay, M.J., Giauque, C.H.W., Teague, E.C.

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Surface roughness studies with DALLAS-detector array for laser light angular scattering von VORBURGER, T.V, TEAGUE, E.C, SCIRE, F.E, MCLAY, M.J, GILSINN, D.E

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Hydrodynamic drag versus roughness for rotating disks von Vorburger, T.V., Scire, F.E., Teague, E.C.

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Measurements of stylus radii von Vorburger, T.V., Teague, E.C., Scire, F.E., Rosberry, F.W.

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Metrology standards for advanced semiconductor lithography referenced to atomic spacings and geometry von Teague, E.C., Linholm, L.W., Cresswell, M.W., Penzes, W.B., Kramar, J.A., Scire, F.E., Villarrubia, J.S., Jun, J.S.

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