Misfit strain dependence of ferroelectric and piezoelectric properties of clamped (001) epitaxial Pb(Zr0.52,Ti0.48)O3 thin films von Nguyen, Minh D., Dekkers, Matthijn, Houwman, Evert, Steenwelle, Ruud, Wan, Xin, Roelofs, Andreas, Schmitz-Kempen, Thorsten, Rijnders, Guus

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Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals von PRUME, Klaus, MURALT, Paul, CALAME, Florian, SCHMITZ-KEMPEN, Thorsten, TIEDKE, Stephan

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Heat generation in PZT MEMS actuator arrays von Fragkiadakis, Charalampos, Sivaramakrishnan, Subramanian, Schmitz-Kempen, Thorsten, Mardilovich, Peter, Trolier-McKinstry, Susan

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Critical thickness for extrinsic contributions to the dielectric and piezoelectric response in lead zirconate titanate ultrathin films von Bastani, Yaser, Schmitz-Kempen, Thorsten, Roelofs, Andreas, Bassiri-Gharb, Nazanin

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Challenges in double-beam laser interferometry measurements of fully released piezoelectric films von Liu, Tianning, Tipsawat, Pannawit, Zhu, Wanlin, Jackson, Thomas N., Sivaramakrishnan, Mani, Mardilovich, Peter, Schmitz-Kempen, Thorsten, Trolier-McKinstry, Susan

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Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices von Prume, K., Muralt, P., Calame, F., Schmitz-Kempen, T., Tiedke, S.

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Misfit strain dependence of ferroelectric and piezoelectric properties of clamped (001) epitaxial Pb(Zr 0.52 ,Ti 0.48 )O 3 thin films von Nguyen, Minh D., Dekkers, Matthijn, Houwman, Evert, Steenwelle, Ruud, Wan, Xin, Roelofs, Andreas, Schmitz-Kempen, Thorsten, Rijnders, Guus

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Infrared-laser based characterization of the pyroelectricity in AlScN thin-films von Bette, Sebastian, Fichtner, Simon, Bröker, Sebastian, Nielen, Lutz, Schmitz-Kempen, Thorsten, Wagner, Bernhard, Van Buggenhout, Carl, Tiedke, Stephan, Tappertzhofen, Stefan

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Deposition of highly crystalline AlScN thin films using synchronized high-power impulse magnetron sputtering: From combinatorial screening to piezoelectric devices von Patidar, Jyotish, Thorwarth, Kerstin, Schmitz-Kempen, Thorsten, Kessels, Roland, Siol, Sebastian

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A physical method for investigating defect chemistry in solid metal oxides von Rodenbücher, Christian, Korte, Carsten, Schmitz-Kempen, Thorsten, Bette, Sebastian, Szot, Kristof

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Surface mapping of field-induced piezoelectric strain at elevated temperature employing full-field interferometry von Stevenson, Tim, Quast, Tatjana, Bartl, Guido, Schmitz-Kempen, Thorsten, Weaver, Paul M.

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Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS -- from combinatorial screening to piezoelectric devices von Patidar, Jyotish, Thorwarth, Kerstin, Schmitz-Kempen, Thorsten, Kessels, Roland, Siol, Sebastian

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A device for measuring piezoelectricity von Thorsten Schmitz-Kempen, Tom Kremers, Markys Cain

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A device for measuring piezoelectricity von Thorsten Schmitz-Kempen, Tom Kremers, Markys Cain, Jack Barraclough

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A physical method for investigating defect chemistry in solid metal oxides von Rodenbücher, Christian, Korte, Carsten, Schmitz-Kempen, Thorsten, Sebastian, Bette, Szot, Kristof

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Deposition of highly-crystalline AlScN thin films using synchronized HiPIMS -- from combinatorial screening to piezoelectric devices von Patidar, Jyotish, Thorwarth, Kerstin, Schmitz-Kempen, Thorsten, Kessels, Roland, Siol, Sebastian

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Verfahren zur Ermittlung einer probenspezifischen Größe einer piezoelektrischen Dünnschichtprobe von Schmitz-Kempen, Thorsten

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Verfahren und Vorrichtung zur Bestimmung dehnungsabhängiger Größen von Kessels, Roland, Schmitz-Kempen, Thorsten

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METHOD AND DEVICE FOR DETERMINING EXTENSION-DEPENDENT VARIABLES von KESSELS, Roland, SCHMITZ-KEMPEN, Thorsten

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Verfahren zur Ermittlung einer probenspezifischen Größe einer piezoelektrischen Dünnschichtprobe von SCHMITZ-KEMPEN, THORSTEN

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