Apparatus and method for storing interferometric images of scanned defects and for subsequent static analysis of such defects von DORUNDO, ALAN DAVID, LISANKE, MICHAEL GERARD, TAHERI, ALI REZA, PENA, LANPHUONG THI, LU, HUIZONG, WATTS, KENNETH WAYNE, SO, SAMUEL SHEUNG-LOK, WHITAKER, DARELL SMITH, BOU-GHANNAM, AKRAM AREF

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