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  1. 1
    Chemical mechanical polishing of copper-oxide damascene structures

    Chemical mechanical polishing of copper-oxide damascene structures von Lai, Jiun-Yu, Saka, Nanaji, Oh, Hilario

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  2. 2
    In-situ method and apparatus for end point detection in chemical mechanical polishing

    In-situ method and apparatus for end point detection in chemical mechanical polishing von Saka, Nanaji, Nam, Jamie, Oh, Hilario

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  3. 3
    Chemical mechanical polishing of copper-oxide damascene structures

    Chemical mechanical polishing of copper-oxide damascene structures von Saka, Nanaji, Lai, Jiun-Yu, Oh, Hilario L

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  4. 4
    In-situ method and apparatus for end point detection in chemical mechanical polishing

    In-situ method and apparatus for end point detection in chemical mechanical polishing von OH HILARIO L, NAM JAMIE, SAKA NANAJI

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  5. 5
    Chemical mechanical polishing of copper-oxide damascene structures

    Chemical mechanical polishing of copper-oxide damascene structures von OH HILARIO L, LAI JIUN-YU, SAKA NANAJI

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  6. 6
    Chemical mechanical polishing of copper-oxide damascene structures

    Chemical mechanical polishing of copper-oxide damascene structures von OH HILARIO L, LAI JIUN-YU, SAKA NANAJI

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  7. 7
    Chemical mechanical polishing of copper-oxide damascene structures

    Chemical mechanical polishing of copper-oxide damascene structures von OH HILARIO L, LAI JIUN-YU, SAKA NANAJI

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