Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films von Hees, J, Heidrich, N, Pletschen, W, Sah, R E, Wolfer, M, Williams, O A, Lebedev, V, Nebel, C E, Ambacher, O

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Elastic properties of ultrathin diamond/AlN membranes von Zuerbig, V., Hees, J., Pletschen, W., Sah, R.E., Wolfer, M., Kirste, L., Heidrich, N., Nebel, C.E., Ambacher, O., Lebedev, V.

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Transparent diamond electrodes for tunable micro-optical devices von Zuerbig, V., Pletschen, W., Hees, J., Sah, R.E., Kirste, L., Heidrich, N., Nebel, C.E., Ambacher, O., Lebedev, V.

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Piezoelectrically actuated diamond cantilevers for high-frequency applications von Heidrich, N., Zuerbig, V., Iankov, D., Pletschen, W., Sah, R.E., Raynor, B., Kirste, L., Nebel, C.E., Ambacher, O., Lebedev, V.

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Wet etching studies of silicon nitride thin films deposited by electron cyclotron resonance (ECR) plasma enhanced chemical vapor deposition von Sundaram, K.B., Sah, R.E., Baumann, H., Balachandran, K., Todi, R.M.

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Enhanced mechanical performance of AlN nanodiamond micro-resonators von Heidrich, N, Iankov, D, Hees, J, Pletschen, W, Sah, R E, Kirste, L, Zuerbig, V, Nebel, C, Ambacher, O, Lebedev, V

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Silicon Nitride Films Deposited Using ECR-PECVD Technique for Coating InGaAlAs High Power Laser Facets von Sah, R. E., Rinner, F., Baumann, H., Kiefer, R., Mikulla, M., Weimann, G., Dammann, M.

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AlN based microgenerators for powering implantable sensor devices von Bludau, O., Röhlig, C.-C., Knöbber, F., Kirste, L., Sah, R. E., Driad, R., Pletschen, W., Lebedev, V., Cimalla, V.

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Dynamic characterization of thin aluminum nitride microstructures von Knöbber, F., Bludau, O., Röhlig, C.-C., Sah, R. E., Williams, O. A., Kirste, L., Leopold, S., Pätz, D., Cimalla, V., Ambacher, O., Lebedev, V.

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Amorphous carbon coatings prepared by high rate rf plasma deposition from fluorinated benzenes von SAH, R. E, DISCHLER, B, BUBENZER, A, KOIDL, P

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Diamond/AlN Thin Films for Optical Applications von Knoebber, F., Bludau, O., Williams, O. A., Sah, R. E., Kirste, L., Baeumler, M., Nebel, C. E., Ambacher, O., Cimalla, V., Lebedev, V., Leopold, S., Paetz, D.

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Fabrication of dry-etched mirrors in GaAs-based and InP-based lasers using chemically assisted ion-beam etching at low temperatures von SAH, R. E, RALSTON, J. D, DALEIDEN, J, LARKINS, E. C, WEISSER, S, FLEISSNER, J, BENZ, W

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Passivation of InP heterojunction bipolar transistors by strain controlled plasma assisted electron beam evaporated hafnium oxide von Driad, R., Sah, R. E., Schmidt, R., Kirste, L.

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Compositional study of silicon oxynitride thin films deposited using electron cyclotron resonance plasma-enhanced chemical vapor deposition technique von Baumann, H., Sah, R. E.

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Correlation Between Composition and Stress for High Density Plasma CVD Silicon Nitride Films von Sah, R. E., Baumann, H., Driad, R., Wagner, J.

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Room-temperature, high-deposition-rate, plasma-enhanced chemical vapour deposition of silicon oxynitride thin films producing low surface damage on lattice-matched and pseudomorphi... von Sah, R.E., Ralston, J.D., Eichin, G., Dischler, B., Rothemund, W., Wagner, J., Larkins, E.C., Baumann, H.

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Electrostatically coupled vibration modes in unimorph complementary microcantilevers von Lebedev, V., Heidrich, N., Knöbber, F., Sah, R. E., Pletschen, W., Raynor, B., Polyakov, V., Cimalla, V., Ambacher, O.

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Residual stress stability in fiber textured stoichiometric AlN film grown using rf magnetron sputtering von Sah, R. E., Kirste, L., Baeumler, M., Hiesinger, P., Cimalla, V., Lebedev, V., Baumann, H., Zschau, H.-E.

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Enhanced mechanical performance of AIN/nanodiamond micro-resonators von HEIDRICH, N, IANKOV, D, HEES, J, PLETSCHEN, W, SAH, R. E, KIRSTE, L, ZUERBIG, V, NEBEL, C, AMBACHER, O, LEBEDEV, V

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Characteristics of a two-component chemically-assisted ion-beam etching technique for dry-etching of high-speed multiple quantum well laser mirrors von Sah, R. E., Ralston, J. D., Weisser, S., Eisele, K.

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