Effects of adhesion layer (Ti or Zr) and Pt deposition temperature on the properties of PZT thin films deposited by RF magnetron sputtering von Mardare, C.C., Joanni, E., Mardare, A.I., Fernandes, J.R.A., Sá, C.P.M. de, Tavares, P.B.

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The performance of Zr as barrier layer for Pt bottom electrodes in Pb(Zr,Ti)O 3 thin film capacitors von Mardare, C.C., Joanni, E., Mardare, A.I., de Sá, C.P.M., Tavares, P.B.

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The performance of Zr as barrier layer for Pt bottom electrodes in Pb(Zr,Ti)O3 thin film capacitors von MARDARE, C. C, JOANNI, E, MARDARE, A. I, DE SA, C. P. M, TAVARES, P. B

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