METHOD AND DEVICE FOR INCREASING LATERAL UNIFORMITY AND DENSITY OF LOW-TEMPERATURE PLASMA IN WIDE-APERTURE MICROELECTRONICS PROCESS REACTORS von Rylov Aleksej Anatolevich, Lukichev Vladimir Fedorovich, Rudenko Konstantin Vasilevich, Semin Yurij Fedorovich, Averkin Sergej Nikolaevich, Antipov Aleksandr Pavlovich, Myakonkikh Andrej Valerevich

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METHOD OF ANISOTROPIC PLASMA ETCHING OF SILICON MICROSTRUCTURES IN A CYCLIC TWO-STEP OXIDATION-ETCHING PROCESS von Rylov Aleksej Anatolevich, Lukichev Vladimir Fedorovich, Rudenko Konstantin Vasilevich, Semin Yurij Fedorovich, Averkin Sergej Nikolaevich, Antipov Aleksandr Pavlovich, Myakonkikh Andrej Valerevich

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WELL INHIBITION METHOD von Polyakov Igor Genrikhovich, Timerbulatov Askar Ramazanovich, Idiatulin Sergej Aleksandrovich, Malyshev Dmitrij Anatolevich, Leontev Ivan Nikolaevich, Rylov Nikolaj Evgenevich, Ekotov Andrej Gennadievich, Pichugin Dmitrij Alekseevich, Serezhnikov Aleksej Petrovich

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LIGATURE FOR MELTING TITANIUM ALLOYS von Zelyanskij Andrej Vladimirovich, Vokhmentsev Sergej Anatolevich, Aleshin Aleksandr Pavlovich, Puzakov Igor Yurevich, Larionov Aleksej Valerevich, Rylov Aleksandr Nikolaevich, Leder Mikhail Ottovich, Tarenkova Natalya Yurevna, Trubachev Mikhail Vladimirovich

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