Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics von Ryzhkov, Vitaly V, Echeistov, Vladimir V, Zverev, Aleksandr V, Baklykov, Dmitry A, Konstantinova, Tatyana, Lotkov, Evgeny S, Ryazantcev, Pavel G, Sh. Alibekov, Ruslan, Kuguk, Aleksey K, Aleksandrov, Andrey R, Krasko, Elisey S, Barbasheva, Anastasiya A, Ryzhikov, Ilya A, Rodionov, Ilya A

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Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics von Ryzhkov, Vitaly V, Echeistov, Vladimir V, Zverev, Aleksandr V, Baklykov, Dmitry A, Konstantinova, Tatyana, Lotkov, Evgeny S, Ryazantcev, Pavel G, Alibekov, Ruslan Sh, Kuguk, Aleksey K, Aleksandrov, Andrey R, Krasko, Elisey S, Barbasheva, Anastasiya A, Ryzhikov, Ilya A, Rodionov, Ilya A

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Integrated membrane-free thermal flow sensor for silicon-on-glass microfluidics von Ryzhkov, Vitaly V, Echeistov, Vladimir V, Zverev, Aleksandr V, Baklykov, Dmitry A, Konstantinova, Tatyana, Lotkov, Evgeny S, Ryazantcev, Pavel G, Ruslan Sh Alibekov, Kuguk, Aleksey K, Aleksandrov, Andrey R, Krasko, Elisey S, Barbasheva, Anastasiya A, Ryzhikov, Ilya A, Rodionov, Ilya A

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