PECVD synthesis and optical properties of BCXNY films obtained from N-triethylborazine as a single-source precursor von Sulyaeva, V.S., Kosinova, M.L., Rumyantsev, Yu.M., Kesler, V.G., Kuznetsov, F.A.

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Study of structure and phase composition of nanocrystal silicon carbonitride films von Fainer, N.I., Maximovski, E.A., Rumyantsev, Yu.M., Kosinova, M.L., Kuznetsov, F.A.

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The structure study of boron carbonitride films obtained by use of trimethylamine borane complex von Kosinova, M.L., Rumyantsev, Yu.M., Fainer, N.I., Maximovski, E.A., Kuznetsov, F.A.

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Mechanical stresses in silicon carbonitride films obtained by PECVD from hexamethyldisilazane von Shayapov, V.R., Rumyantsev, Yu.M., Dzyuba, A.A., Ayupov, B.M., Fainer, N.I.

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The investigation of properties of silicon nitride films obtained by RPECVD from hexamethyldisilazane von Fainer, N.I., Rumyantsev, Yu.M., Kosinova, M.L., Yurjev, G.S., Maximovskii, E.A., Kuznetsov, F.A.

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Chemical characterization of SiCxNy nanolayers by FTIR-and Raman spectroscopy, XPS and TXRF-NEXAFS von Baake, O., Fainer, N.I., Hoffmann, P., Kosinova, M.L., Rumyantsev, Yu.M., Trunova, V.A., Klein, A., Ensinger, W., Pollakowski, B., Beckhoff, B., Ulm, G.

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Plasma enhanced chemical vapour deposition of BCxNy films prepared from N-trimethylborazine : Modelling, synthesis and characterization von SULYAEVA, V. S, RUMYANTSEV, Yu. M, KOSINOVA, M. L, GOLUBENKO, A. N, FAINER, N. I, KUZNETSOV, F. A

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Chemical characterization of SiC x N y nanolayers by FTIR-and Raman spectroscopy, XPS and TXRF-NEXAFS von Baake, O., Fainer, N.I., Hoffmann, P., Kosinova, M.L., Rumyantsev, Yu.M., Trunova, V.A., Klein, A., Ensinger, W., Pollakowski, B., Beckhoff, B., Ulm, G.

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Plasma enhanced chemical vapour deposition of BC x N y films prepared from N-trimethylborazine: Modelling, synthesis and characterization von Sulyaeva, V.S., Rumyantsev, Yu.M., Kosinova, M.L., Golubenko, A.N., Fainer, N.I., Kuznetsov, F.A.

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Synthesis of nanocrystalline silicon carbonitride films by remote plasma enhanced chemical vapor deposition using the mixture of hexamethyldisilazane with helium and ammonia von Fainer, N.I., Rumyantsev, Yu.M., Golubenko, A.N., Kosinova, M.L., Kuznetsov, F.A.

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Growth of PbS and CdS thin films by low-pressure chemical vapour deposition using dithiocarbamates von Fainer, N.I., Kosinova, M.L., Rumyantsev, Yu.M., Salman, E.G., Kuznetsov, F.A.

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Study of the structure and phase composition of nanocrystalline silicon oxynitride films synthesized by ICP-CVD von Fainer, N.I., Kosinova, M.L., Maximovsky, E.A., Rumyantsev, Yu.M., Kuznetsov, F.A., Kesler, V.G., Kirienko, V.V.

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The structure study of thin boron and silicon carbonitride films by diffraction of synchrotron radiation von Fainer, N.I, Kosinova, M.L, Yurjev, G.S, Maximovski, E.A, Rumyantsev, Yu.M, Asanov, I.P

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The structure study of thin cadmium and copper sulphide films by diffraction of synchrotron radiation von Fainer, N.I., Rumyantsev, Yu.M., Kosinova, M.L., Zemskova, S.M., Maximovskiy, E.A., Yurjev, G.S., Sivykh, G.F.

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The structure study of thin semiconductor and dielectric films by diffraction of synchrotron radiation von Yurjev, G.S., Fainer, N.I., Maximovskiy, E.A., Kosinova, M.L., Sheromov, M.A., Rumyantsev, Yu.M.

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Plasma-deposited CdS layers from (o-phen) bis (diethyldithiocarbamate) cadmium von Fainer, N.I, Rumyantsev, Yu.M, Salman, E.G, Kosinova, M.L, Yurjev, G.S, Sysoeva, N.P, Maximovskii, E.A, Sysoev, S.V, Golubenko, A.N

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DEVICE FOR ELECTRIC-LIQUID EPITAXY von RUMYANTSEV YU.M.,SU, DEMIN V.N.,SU, KUZNETSOV F.A.,SU

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Li-rich and Ni-rich transition metal oxides: Coating and core-shell structures von Makhonina, E.V., Maslennikova, L.S., Volkov, V.V., Medvedeva, A.E., Rumyantsev, A.M., Koshtyal, Yu.M., Maximov, M. Yu, Pervov, V.S., Eremenko, I.L.

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