High-performance silver-dielectric interference filters for RGBIR imaging von Frey, Laurent, Masarotto, Lilian, El Melhaoui, Loubna, Verrun, Sophie, Minoret, Stéphane, Rodriguez, Guillaume, André, Agathe, Ritton, Frédéric, Parrein, Pascale

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Resist Stripping Process on Germanium : a Basic Post-Implant Study von Lachal, Laurent, Chiaroni, Julien, Le Royer, Cyrille, Ritton, Frederic, Manfredonia, Raphael, Perrin, Fabrice

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Silicon Dry Etching Process for High Topography Sub-micro and Nano-devices von De Luca, Anothony, Ritton, Frederic, Gelly, Marc, Buckley, Julien, Heitzman, Michel

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Organic Mask Removal Assessment for 32nm Fully Depleted SOI Technology with TiN-metal Gate on HfO2 von Lachal, Laurent, Chiaroni, Julien, Lajoinie, Emile, Louveau, Olivier, Ritton, Frederic, Lavios, Pascal, Finet, Jean-Marc, Biranceau, Pierre, Arnoux, André, Sauvagnargues, Eric, Bailloux, Olivier, Medico, Gino, Tallaron, Christiane, Humbert, Franck, Rochat, Névine, Martinez, Eugenie

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Silicon Dry Etching Process for High Topography Sub-micro and Nano-devices von De Luca, Anothony, Ritton, Frederic, Gelly, Marc, Buckley, Julien, Heitzman, Michel

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