Treffer 1 - 5 von 5 für Suche 'Rhee, Hyongmoo', Suchdauer: 0,51s Treffer weiter einschränken
  1. 1
    Development of an alkali-metal-free bath for electroless deposition of Co-W-P capping layers for copper interconnections

    Development of an alkali-metal-free bath for electroless deposition of Co-W-P capping layers for copper interconnections von Dulal, S.M.S.I., Kim, Tae Ho, Rhee, Hyongmoo, Sung, Joon Yong, Kim, Chang-Koo

    Veröffentlicht in Journal of alloys and compounds

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  2. 2
    Comparison of deep silicon etching using SF6/C4F8 and SF6/C4F6 plasmas in the Bosch process

    Comparison of deep silicon etching using SF6/C4F8 and SF6/C4F6 plasmas in the Bosch process von Rhee, Hyongmoo, Kwon, Hyeokkyu, Kim, Chang-Koo, Kim, HyunJung, Yoo, Jaisuk, Kim, Yil Wook


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  3. 3
    Dependence of etch rates of silicon substrates on the use of C4F8 and C4F6 plasmas in the deposition step of the Bosch process

    Dependence of etch rates of silicon substrates on the use of C4F8 and C4F6 plasmas in the deposition step of the Bosch process von Rhee, Hyongmoo, Lee, Hae Min, Namkoung, Yun Mi, Kim, Chang-Koo, Chae, Heeyeop, Kim, Yil Wook


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  4. 4
    Dependence of etch rates of silicon substrates on the use of C 4 F 8 and C 4 F 6 plasmas in the deposition step of the Bosch process

    Dependence of etch rates of silicon substrates on the use of C 4 F 8 and C 4 F 6 plasmas in the deposition step of the Bosch process von Rhee, Hyongmoo, Lee, Hae Min, Namkoung, Yun Mi, Kim, Chang-Koo, Chae, Heeyeop, Kim, Yil Wook


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  5. 5
    Comparison of deep silicon etching using SF 6 / C 4 F 8 and SF 6 / C 4 F 6 plasmas in the Bosch process

    Comparison of deep silicon etching using SF 6 / C 4 F 8 and SF 6 / C 4 F 6 plasmas in the Bosch process von Rhee, Hyongmoo, Kwon, Hyeokkyu, Kim, Chang-Koo, Kim, HyunJung, Yoo, Jaisuk, Kim, Yil Wook


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