Effect of composition inhomogeneity in a-SioxNy thin films on their optical properties von REBIB, Farida, TOMASELLA, Eric, MICHELI, Victor, EYPERT, Celine, CELLIER, Joel, LAIDANI, Nadhira

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Structural and Optical Investigations of Silicon Carbon Nitride Thin Films Deposited by Magnetron Sputtering von Tomasella, Eric, Spinelle, Laurent, Bousquet, Angélique, Rebib, Farida, Dubois, Marc, Eypert, Céline, Gaston, Jean Paul, Cellier, Joel, Sauvage, Thierry

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Effect of composition inhomogeneity in a-SiO x N y thin films on their optical properties von Rebib, Farida, Tomasella, Eric, Micheli, Victor, Eypert, Celine, Cellier, Joel, Laidani, Nadhira

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Influence of Substrate Biasing on the Structural and Electrical Properties of Sputtered Zirconia Thin Films von Rebib, Farida, Bousquet, Angélique, Tomasella, Eric, Micheli, Victor, Gottardi, Gloria, Laidani, Nadhira

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Influence of the Structure of a-SiOxNy Thin Films on Their Electrical Properties von Rebib, Farida, Tomasella, Eric, Aida, Salah, Dubois, Marc, Bêche, Eric, Cellier, Joel, Jacquet, Michel

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Study of Reactive RF Sputtering Process of Silicon Target Under ArO2N2 Atmospheres von Rebib, Farida, Tomasella, Eric, Thomas, Laurent, Cellier, Joel, Sauvage, Thierry, Jacquet, Michel

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Mechanical Study of High Resistance Silicon Carbide Based Multi-Nano-Layers Grown by Multifrequency PACVD von Rebib, Farida, Gaudy, Thomas, Soum-Glaude, Audrey, Caron, Isabelle, Da Silva, Tony, Picard, Christine, Cournut, Fabienne, Thomas, Laurent

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