The spring constant calibration of the piezoresistive cantilever based biosensor von Jóźwiak, G., Kopiec, D., Zawierucha, P., Gotszalk, T., Janus, P., Grabiec, P., Rangelow, I.W.

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Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications von Rangelow, I.W., Ivanov, Tzv, Ivanova, K., Volland, B.E., Grabiec, P., Sarov, Y., Persaud, A., Gotszalk, T., Zawierucha, P., Zielony, M., Dontzov, D., Schmidt, B., Zier, M., Nikolov, N., Kostic, I., Engl, W., Sulzbach, T., Mielczarski, J., Kolb, S., Latimier, Du P., Pedreau, R., Djakov, V., Huq, S.E., Edinger, K., Fortagne, O., Almansa, A., Blom, H.O.

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Thermomechanically and electromagnetically actuated piezoresistive cantilevers for fast-scanning probe microscopy investigations von Majstrzyk, W., Ahmad, A., Ivanov, Tzv, Reum, A., Angelow, T., Holz, M., Gotszalk, T., Rangelow, I.W.

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Scanning probe nanolithography on calixarene von Kaestner, M., Rangelow, I.W.

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Thermo-mechanical transduction suitable for high-speed scanning probe imaging and lithography von Angelov, T., Roeser, D., Ivanov, T., Gutschmidt, S., Sattel, T., Rangelow, I.W.

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Contact atomic force microscopy using piezoresistive cantilevers in load force modulation mode von Biczysko, P., Dzierka, A., Jóźwiak, G., Rudek, M., Gotszalk, T., Janus, P., Grabiec, P., Rangelow, I.W.

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Reactive ion etching for high aspect ratio silicon micromachining von Rangelow, I.W.

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Investigations of the sorption behaviour of amorphous nitrogen-rich carbon nitride films as sensitive layers for cantilever-based chemical sensors von ABEDINOV, N, POPOV, C, YORDANOV, Z, RANGELOW, I. W, KULISCH, W

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Nanostructuring of Mo/Si multilayers by means of reactive ion etching using a three-level mask von Dreeskornfeld, L., Haindl, G., Kleineberg, U., Heinzmann, U., Shi, F., Volland, B., Rangelow, I.W., Majkova, E., Luby, S., Kostic, Matay, L., Hrkut, P., Hudek, P., Lee, Hsin-Yi

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Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution von Meijer, J., Pezzagna, S., Vogel, T., Burchard, B., Bukow, H.H., Rangelow, I.W., Sarov, Y., Wiggers, H., Plümel, I., Jelezko, F., Wrachtrup, J., Schmidt-Kaler, F., Schnitzler, W., Singer, K.

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High speed quasi-monolithic silicon/piezostack SPM scanning stage von Guliyev, E., Michels, Th, Volland, B.E., Ivanov, Tzv, Hofer, M., Rangelow, I.W.

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Concept of deterministic single ion doping with sub-nm spatial resolution von MEIJER, J, VOGEL, T, SINGER, K, SCHMIDT-KALER, F, BURCHARD, B, RANGELOW, I. W, BISCHOFF, L, WRACHTRUP, J, DOMHAN, M, JELEZKO, F, SCHNITZLER, W, SCHULZ, S. A

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Electrostatically driven microgripper von Volland, B.E., Heerlein, H., Rangelow, I.W.

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ARCH-type micro-cantilever FPA for uncooled IR detection von Steffanson, M., Gorovoy, K., Ramkiattisak, V., Ivanov, T., Król, J., Hartmann, H., Rangelow, I.W.

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Chemical gas sensors based on calixarene-coated discontinuous gold films von Filenko, D., Gotszalk, T., Kazantseva, Z., Rabinovych, O., Koshets, I., Shirshov, Yu, Kalchenko, V., Rangelow, I.W.

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Quantum size aspects of the piezoresistive effect in ultra thin piezoresistors von Ivanov, Tzv, Gotszalk, T., Sulzbach, T., Rangelow, I.W.

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Thermally driven micromechanical beam with piezoresistive deflection readout von Ivanov, Tzv, Gotszalk, T., Grabiec, P., Tomerov, E., Rangelow, I.W.

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Quantitative force and mass measurements using the cantilever with integrated actuator and deflection detector von Woszczyna, M., Zawierucha, P., Świątkowski, M., Gotszalk, T., Grabiec, P., Nikolov, N., Mielczarski, J., Mielczarska, E., Glezos, N., Ivanow, Tzv, Ivanowa, K., Sarov, Y., Rangelow, I.W.

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Duo-action electro thermal micro gripper von Volland, B.E., Ivanova, K., Ivanov, Tzv, Sarov, Y., Guliyev, E., Persaud, A., Zöllner, J.-P., Klett, S., Kostic, I., Rangelow, I.W.

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Thermally driven piezoresistive cantilevers for shear-force microscopy von Woszczyna, M., Gotszalk, T., Zawierucha, P., Zielony, M., Ivanow, Tzv, Ivanowa, K., Sarov, Y., Nikolov, N., Mielczarski, J., Mielczarska, E., Rangelow, I.W.

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