Integration of Scanning Probes and Ion Beams von Persaud, A, Park, S. J, Liddle, J. A, Schenkel, T, Bokor, J, Rangelow, I. W

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Electrostatically driven microgripper von Volland, B.E., Heerlein, H., Rangelow, I.W.

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Thermally driven multi-layer actuator for 2D cantilever arrays von Sarov, Y., Ivanov, T., Frank, A., Rangelow, I. W.

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Concept of deterministic single ion doping with sub-nm spatial resolution von MEIJER, J, VOGEL, T, SINGER, K, SCHMIDT-KALER, F, BURCHARD, B, RANGELOW, I. W, BISCHOFF, L, WRACHTRUP, J, DOMHAN, M, JELEZKO, F, SCHNITZLER, W, SCHULZ, S. A

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Quantum size aspects of the piezoresistive effect in ultra thin piezoresistors von Ivanov, Tzv, Gotszalk, T., Sulzbach, T., Rangelow, I.W.

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Scanning probe nanolithography on calixarene von Kaestner, M., Rangelow, I.W.

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Thermally driven micromechanical beam with piezoresistive deflection readout von Ivanov, Tzv, Gotszalk, T., Grabiec, P., Tomerov, E., Rangelow, I.W.

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Piezoresistive and self-actuated 128-cantilever arrays for nanotechnology applications von Rangelow, I.W., Ivanov, Tzv, Ivanova, K., Volland, B.E., Grabiec, P., Sarov, Y., Persaud, A., Gotszalk, T., Zawierucha, P., Zielony, M., Dontzov, D., Schmidt, B., Zier, M., Nikolov, N., Kostic, I., Engl, W., Sulzbach, T., Mielczarski, J., Kolb, S., Latimier, Du P., Pedreau, R., Djakov, V., Huq, S.E., Edinger, K., Fortagne, O., Almansa, A., Blom, H.O.

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Chemical gas sensors based on calixarene-coated discontinuous gold films von Filenko, D., Gotszalk, T., Kazantseva, Z., Rabinovych, O., Koshets, I., Shirshov, Yu, Kalchenko, V., Rangelow, I.W.

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Contact atomic force microscopy using piezoresistive cantilevers in load force modulation mode von Biczysko, P., Dzierka, A., Jóźwiak, G., Rudek, M., Gotszalk, T., Janus, P., Grabiec, P., Rangelow, I.W.

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Towards alternative 3D nanofabrication in macroscopic working volumes von Kühnel, M, Fröhlich, T, Füßl, R, Hoffmann, M, Manske, E, Rangelow, I W, Reger, J, Schäffel, C, Sinzinger, S, Zöllner, J-P

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Quantitative force and mass measurements using the cantilever with integrated actuator and deflection detector von Woszczyna, M., Zawierucha, P., Świątkowski, M., Gotszalk, T., Grabiec, P., Nikolov, N., Mielczarski, J., Mielczarska, E., Glezos, N., Ivanow, Tzv, Ivanowa, K., Sarov, Y., Rangelow, I.W.

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Duo-action electro thermal micro gripper von Volland, B.E., Ivanova, K., Ivanov, Tzv, Sarov, Y., Guliyev, E., Persaud, A., Zöllner, J.-P., Klett, S., Kostic, I., Rangelow, I.W.

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Thermal nano-probe von Rangelow, I.W., Gotszalk, T., Grabiec, P., Edinger, K., Abedinov, N.

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Thermomechanically and electromagnetically actuated piezoresistive cantilevers for fast-scanning probe microscopy investigations von Majstrzyk, W., Ahmad, A., Ivanov, Tzv, Reum, A., Angelow, T., Holz, M., Gotszalk, T., Rangelow, I.W.

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Local formation of nitrogen-vacancy centers in diamond by swift heavy ions von Schwartz, J., Aloni, S., Ogletree, D. F., Tomut, M., Bender, M., Severin, D., Trautmann, C., Rangelow, I. W., Schenkel, T.

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The spring constant calibration of the piezoresistive cantilever based biosensor von Jóźwiak, G., Kopiec, D., Zawierucha, P., Gotszalk, T., Janus, P., Grabiec, P., Rangelow, I.W.

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Integrated plasma processing simulation framework, linking tool scale plasma models with 2D feature scale etch simulator von Hauguth, M., Volland, B.E., Ishchuk, V., Dressler, D., Danz, T., Rangelow, I.W., Kokkoris, G., Gogolides, E., Goodyear, A., Cooke, M.

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Aspect ratio dependent plasma polymer deposition of fluorocarbons von Volland, B.E., Rangelow, I.W.

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New method for the precise flux calculation of neutrals for arbitrary surfaces in profile etch simulations von Hauguth, M., Danz, T., Volland, B.E., Ishshuk, V., Dreßler, D., Rangelow, I.W.

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