METHOD OF MANUFACTURING DEEPLY PROFILED SILICON STRUCTURES von TIMOSHENKOV ALEKSEJ SERGEEVICH, MIRONOV SERGEJ GENNAD'EVICH, RAPIDOV MIKHAIL OL'GERDOVICH, RUBCHITS VADIM GRIGOR'EVICH, TIMOSHENKOV SERGEJ PETROVICH, SHILOV VALERIJ FEDOROVICH

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METHOD OF OUTER CORNER OVER-ETCHING COMPENSATION IN FIGURES ETCHED ON SILICON PLATES WITH SURFACE ORIENTATION (100) von LAPENKO VADIM NIKOLAEVICH, BRITKOV OLEG MIKHAJLOVICH, CHAPLYGIN JURIJ ALEKSANDROVICH, PLEKHANOV VJACHESLAV EVGEN'EVICH, RUBCHITS VADIM GRIGOR'EVICH, TIMOSHENKOV SERGEJ PETROVICH, SHILOV VALERIJ FEDOROVICH, BALYCHEV VLADIMIR NIKOLAEVICH, MOROZOVA ELENA SERGEEVNA, KALUGIN VIKTOR VLADIMIROVICH, ANCHUTIN STEPAN ALEKSANDROVICH, MAKSIMOV VLADIMIR NIKOLAEVICH, ZOTOV SERGEJ ALEKSANDROVICH

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METHOD FOR GAP MEASUREMENT IN MICROMECHANICAL SENSOR von LAPENKO VADIM NIKOLAEVICH, BALYCHEV VLADIMIR NIKOLAEVICH, MOROZOVA ELENA SERGEEVNA, CHAPLYGIN JURIJ ALEKSANDROVICH, KALUGIN VIKTOR VLADIMIROVICH, PLEKHANOV VJACHESLAV EVGEN'EVICH, ANCHUTIN STEPAN ALEKSANDROVICH, RUBCHITS VADIM GRIGOR'EVICH, TIMOSHENKOV SERGEJ PETROVICH, MAKSIMOV VLADIMIR NIKOLAEVICH, SHILOV VALERIJ FEDOROVICH, ZOTOV SERGEJ ALEKSANDROVICH

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METHOD OF MEASUREMENT OF MICROMECHANICAL TRANSMITTER SENSOR ELASTIC SUSPENSION RIGIDITY von BALYCHEV VLADIMIR NIKOLAEVICH, MOROZOVA ELENA SERGEEVNA, CHAPLYGIN JURIJ ALEKSANDROVICH, KALUGIN VIKTOR VLADIMIROVICH, PLEKHANOV VJACHESLAV EVGEN'EVICH, ANCHUTIN STEPAN ALEKSANDROVICH, RUBCHITS VADIM GRIGOR'EVICH, TIMOSHENKOV SERGEJ PETROVICH, MAKSIMOV VLADIMIR NIKOLAEVICH, SHILOV VALERIJ FEDOROVICH, ZOTOV SERGEJ ALEKSANDROVICH

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DETECTING ELEMENT OF MICROMECHANICAL GYROSCOPE von KALUGIN VIKTOR VLADIMIROVICH, GLAZKOV OLEG NIKOLAEVICH, RUBCHITS VADIM GRIGOR'EVICH, TIMOSHENKOV SERGEJ PETROVICH, BYLINKIN SERGEJ FEDOROVICH

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MICROMECHANICAL TRANSDUCER SENSING ELEMENT von LAPENKO VADIM NIKOLAEVICH, CHAPLYGIN JURIJ ALEKSANDROVICH, KALUGIN VIKTOR VLADIMIROVICH, PLEKHANOV VJACHESLAV EVGEN'EVICH, TIKHONOV VLADIMIR ANATOL'EVICH, ANCHUTIN STEPAN ALEKSANDROVICH, RUBCHITS VADIM GRIGOR'EVICH, TIMOSHENKOV SERGEJ PETROVICH, MAKSIMOV VLADIMIR NIKOLAEVICH, SHILOV VALERIJ FEDOROVICH, ZOTOV SERGEJ ALEKSANDROVICH

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INTEGRATING MICRO-MECHANICAL VIBRATION GYROSCOPE von LAPENKO VADIM NIKOLAEVICH, KALUGIN VIKTOR VLADIMIROVICH, PLEKHANOV VJACHESLAV EVGEN'EVICH, TIKHONOV VLADIMIR ANATOL'EVICH, ANCHUTIN STEPAN ALEKSANDROVICH, RUBCHITS VADIM GRIGOR'EVICH, TIMOSHENKOV SERGEJ PETROVICH, MAKSIMOV VLADIMIR NIKOLAEVICH, SHILOV VALERIJ FEDOROVICH, ZOTOV SERGEJ ALEKSANDROVICH

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SENSING ELEMENT OF MICROMECHANICAL ACCELEROMETER von KOCHURINA ELENA SERGEEVNA, TIMOSHENKOV ALEKSEJ SERGEEVICH, CHAPLYGIN JURIJ ALEKSANDROVICH, MIRONOV SERGEJ GENNAD'EVICH, KIRGIZOV SERGEJ VIKTOROVICH, GLAZKOV OLEG NIKOLAEVICH, GOLOVAN' ANTON SERGEEVICH, ANCHUTIN STEPAN ALEKSANDROVICH, RUBCHITS VADIM GRIGOR'EVICH, TIMOSHENKOV SERGEJ PETROVICH, SHILOV VALERIJ FEDOROVICH

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SENSITIVE ELEMENT OF INTEGRAL ACCELEROMETRE von MOROZOVA ELENA SERGEEVNA, CHAPLYGIN JURIJ ALEKSANDROVICH, MIRONOV SERGEJ GENNAD'EVICH, RUBCHITS VADIM GRIGOR'EVICH, TIMOSHENKOV SERGEJ PETROVICH, SHILOV VALERIJ FEDOROVICH

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