A comparison of Cl2 and HBr/Cl2-based polysilicon etch chemistries : impact on SiO2 and Si substrate damage von REMBETSKI, J. F, CHAN, Y. D, BODEN, E, TIEER GU, AWADELKARIM, O. O, DITIZIO, R. A, FONASH, S. J, XIAOYU LI, VISWANATHAN, C. R

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Ion trapping for quantum information processing von Maunz, Peter Lukas Wilhelm, Rembetski, John F, Blain, Matthew G, Sterk, Jonathan David, Nordquist, Christopher, Berry, Christopher W, Resnick, Paul J

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A Comparison of Cl 2 and HBr/Cl 2 -Based Polysilicon Etch Chemistries: Impact on SiO 2 and Si Substrate Damage von Rembetski, John F., Chan, Y D., Boden, E., Gu, Tieer, Awadelkarim, O. O., Ditizio, R. A., Fonash, S. J., Li, Xiaoyu, Viswanathan, C. R.

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Selective deposition process von GRUNDON, STEVEN A, HARMON, DAVID L, NGUYEN, SON V, REMBETSKI, JOHN F, ARMACOST, MICHAEL D

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Reactive ion etching buffer mask von HARMON, DAVID L, KERBAUGH, MICHAEL L, REMBETSKI, JOHN F, PASCOE, NANCY T

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PROCESS FOR SELECTIVE DEPOSITION OF A POLYMER COATING von NGUYEN, SON V, GRUNDON, STEVEN A, ARMACOST, MICHAEL D, HARMON, DAVID L, REMBETSKI, JOHN F

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Process for selective deposition of a polymer coating von NGUYEN, SON V, GRUNDON, STEVEN A, ARMACOST, MICHAEL D, HARMON, DAVID L, REMBETSKI, JOHN F

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Reactive ion etching buffer mask von HARMON, DAVID L, KERBAUGH, MICHAEL L, REMBETSKI, JOHN F, PASCOE, NANCY T

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Method of reactive ion etching trenches von HARMON, DAVID L, KERBAUGH, MICHAEL L, PASCOE, NANCY T, REMBETSKI, JOHN F

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The removal of hard masks in semiconductor processing von Rembetski, John F, Rust, Werner, Shepherd, Robert

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METHOD OF PLASMA ETCHING A SUBSTRATE WITH A GASEOUS ORGANOHALIDE COMPOUND von BABU, SURYADEVARA V, HOFFARTH, JOSEPH G, KNOLL, ALLAN R, MLYNKO, WALTER E, REMBETSKI, JOHN F

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Method of forming borderless contacts using a removable mandrel von CRONIN, JOHN E, KENNEY, DONALD M, PARRIES, PAUL, KERBAUGH, MICHAEL L, REMBETSKI, JOHN F, KAANTA, CARTER W, LANDIS, HOWARD S, MACHESNEY, BRIAN J, PREVITI-KELLY, ROSEMARY A

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Method of plasma etching a substrate with a gaseous organohalide compound von BABU, SURYADEVARA V, KNOLL, ALLAN R, REMBETSKI, JOHN F, HOFFARTH, JOSEPH G, MLYNKO, WALTER E, MACK, KENNETH D

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