Treffer 1 - 3 von 3 für Suche 'RASGON STACY A', Suchdauer: 0,40s Treffer weiter einschränken
  1. 1
    METHOD FOR REDUCING FEATURE LINE EDGE ROUGHNESS

    METHOD FOR REDUCING FEATURE LINE EDGE ROUGHNESS von RASGON STACY A, MAHOROWALA ARPAN P, BELL SCOTT A, YAN HONGWEN, YANG CHIH-YUH, MURTHY S. DAKSHINA

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  2. 2
    Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes

    Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes von Goldfarb, Dario L., Mahorowala, Arpan P., Gallatin, Gregg M., Petrillo, Karen E., Temple, Karen, Angelopoulos, Marie, Rasgon, Stacy, Sawin, Herbert H., Allen, Scott D., Lawson, Margaret C., Kwong, Ranee W.


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  3. 3
    Investigation of surface roughening of low- k films during etching using fluorocarbon plasma beams

    Investigation of surface roughening of low- k films during etching using fluorocarbon plasma beams von Yin, Yunpeng, Rasgon, Stacy, Sawin, Herbert H.


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