Molecular Challenges of Immersion and Extreme Ultraviolet (EUV) Resists von Dean, Kim R., Stark, David

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EUV Resist Outgassing: How Much is Too Much? von Dean, Kim R., Debeaux, Gregory, Wüest, Andrea, Garg, Rashi

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The Status of 157nm Lithography Development von Dean, Kim R., Peski, Chris van, Kim, Hyeong Soo, Hien, Stefan, Owe-Yang, D.C., Conley, Will

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Effects of Airborne Molecular Contamination on DUV Photoresists von Dean, Kim R., Miller, Daniel A., Carpio, Ronald A., Petersen, John S., Rich, Georgia K.

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SURVEY OF PROCESSING AFFECTS ON SUBSTRATE COMPATIBILITY OF CHEMICALLY AMPLIFIED RESISTS von Petersen, John S., Fedynyshyn, Theodore H., Thackeray, James W., Dean, Kim R., Sturtevant, John L., Carpio, Ronald A., Rich, Georgia K., Miller, Daniel A.

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Extreme ultraviolet lithography capabilities at the advanced light source using a 0.3-NA optic von Naulleau, P., Goldberg, K.A., Cain, J.P., Anderson, E.H., Dean, K.R., Denham, P., Hoef, B., Jackson, K.H.

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EUV Resist Outgassing von R. Dean, Kim, Debeaux, Gregory, Wüest, Andrea, Garg, Rashi

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Extreme ultraviolet liithography capabilities at the advancedlight source using a 0.3-NA optic von Naulleau, Patrick, Goldberg, Kenneth A., Cain, Jason P., Anderson, Erik H., Dean, Kim R., Denham, Paul, Hoef, Brian, Jackson,Keith H.

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Extreme ultraviolet lithography capabilities at the advanced light source using a 0.3-NA optic : Extreme ultraviolet coherent sources and applications von NAULLEAU, Patrick, GOLDBERG, Kenneth A, CAIN, Jason P, ANDERSON, Erik H, DEAN, Kim R, DENHAM, Paul, HOEF, Brian, JACKSON, Keith H

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Direct temperature metrology helps minimize CA-resist CD variation von Parker, Jeffrey M, Dean, Kim R, Miller, Daniel A

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Photon harvesting by surface-bound polymers: Poly(2-vinylnaphthalene-alt-methacrylic acid) sensitization of pyrenebutyric acid on zeolite von Dean, Kim R., Webber, S.E.

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Antireflective coating process von DEAN, KIM R, PETERSEN, JOHN S, MILLER, DANIEL A

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Nature of the quantum metal in a two-dimensional crystalline superconductor von Tsen, A. W., Hunt, B., Kim, Y. D., Yuan, Z. J., Jia, S., Cava, R. J., Hone, J., Kim, P., Dean, C. R., Pasupathy, A. N.

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Correlated electronic phases in twisted bilayer transition metal dichalcogenides von Wang, Lei, Shih, En-Min, Ghiotto, Augusto, Xian, Lede, Rhodes, Daniel A., Tan, Cheng, Claassen, Martin, Kennes, Dante M., Bai, Yusong, Kim, Bumho, Watanabe, Kenji, Taniguchi, Takashi, Zhu, Xiaoyang, Hone, James, Rubio, Angel, Pasupathy, Abhay N., Dean, Cory R.

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One-Dimensional Electrical Contact to a Two-Dimensional Material von Wang, L., Meric, I., Huang, P. Y., Gao, Q., Gao, Y., Tran, H., Taniguchi, T., Watanabe, K., Campos, L. M., Muller, D. A., Guo, J., Kim, P., Hone, J., Shepard, K. L., Dean, C. R.

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Mastocytosis-derived extracellular vesicles deliver miR-23a and miR-30a into pre-osteoblasts and prevent osteoblastogenesis and bone formation von Kim, Do-Kyun, Bandara, Geethani, Cho, Young-Eun, Komarow, Hirsh D., Donahue, Danielle R., Karim, Baktiar, Baek, Moon-Chang, Kim, Ho Min, Metcalfe, Dean D., Olivera, Ana

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Low-Temperature Ohmic Contact to Monolayer MoS2 by van der Waals Bonded Co/h‑BN Electrodes von Cui, Xu, Shih, En-Min, Jauregui, Luis A, Chae, Sang Hoon, Kim, Young Duck, Li, Baichang, Seo, Dongjea, Pistunova, Kateryna, Yin, Jun, Park, Ji-Hoon, Choi, Heon-Jin, Lee, Young Hee, Watanabe, Kenji, Taniguchi, Takashi, Kim, Philip, Dean, Cory R, Hone, James C

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Hofstadter’s butterfly and the fractal quantum Hall effect in moiré superlattices von Dean, C. R., Wang, L., Maher, P., Forsythe, C., Ghahari, F., Gao, Y., Katoch, J., Ishigami, M., Moon, P., Koshino, M., Taniguchi, T., Watanabe, K., Shepard, K. L., Hone, J., Kim, P.

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Ambipolar charge-transfer graphene plasmonic cavities von Kim, Brian S. Y., Sternbach, Aaron J., Choi, Min Sup, Sun, Zhiyuan, Ruta, Francesco L., Shao, Yinming, McLeod, Alexander S., Xiong, Lin, Dong, Yinan, Chung, Ted S., Rajendran, Anjaly, Liu, Song, Nipane, Ankur, Chae, Sang Hoon, Zangiabadi, Amirali, Xu, Xiaodong, Millis, Andrew J., Schuck, P. James, Dean, Cory. R., Hone, James C., Basov, D. N.

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Quantum criticality in twisted transition metal dichalcogenides von Ghiotto, Augusto, Shih, En-Min, Pereira, Giancarlo S. S. G., Rhodes, Daniel A., Kim, Bumho, Zang, Jiawei, Millis, Andrew J., Watanabe, Kenji, Taniguchi, Takashi, Hone, James C., Wang, Lei, Dean, Cory R., Pasupathy, Abhay N.

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